Ion-wave stabilization of an inductively coupled plasma
- Electronics and Photonics Laboratory, Aerospace Corporation, P.O. Box 92957, Los Angeles, California 90009 (United States)
Stabilization of the rf power driving an inductively coupled plasma (ICP) has implications for fields ranging from atomic clocks to analytical chemistry to illumination technology. Here, we demonstrate a technique in which the plasma itself acts as a probe of radio wave power, and provides a correction signal for active rf-power control. Our technique takes advantage of the resonant nature of forced ion waves in the plasma, and their observation in the ICP's optical emission.
- OSTI ID:
- 20779185
- Journal Information:
- Applied Physics Letters, Vol. 88, Issue 17; Other Information: DOI: 10.1063/1.2198108; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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