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Title: Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface

Abstract

The species and the nature of their chemical bonds at the surface of a hydrogen-terminated Si(211) wafer were characterized using temperature desorption spectroscopy, ion scattering spectroscopy, and electron spectroscopy. The surface region is dominated by monohydride species with dihydrides present in small amounts. Fluorine is distributed across the top layer as largely a physisorbed species to the Si substrate. Low-energy {sup 3}He{sup +} ions remove the H and F species with only minimal damage to the underlying region.

Authors:
; ; ;  [1]
  1. U.S. Army Research, Development and Engineering Command (RDECOM) Communications-Electronics Research, Development and Engineering Center (CERDEC), Night Vision and Electronic Sensors Directorate - NVESD, 10221 Burbeck Road, Fort Belvior, Virginia 22060-5806 (United States)
Publication Date:
OSTI Identifier:
20778623
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 88; Journal Issue: 3; Other Information: DOI: 10.1063/1.2166682; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL BONDS; DESORPTION; ELECTRON SPECTRA; ELECTRON SPECTROSCOPY; FLUORINE; HELIUM 3 BEAMS; HYDROGEN; ION SCATTERING ANALYSIS; LAYERS; SILICON; SUBSTRATES

Citation Formats

Jaime-Vasquez, M, Martinka, M, Groenert, M, and Dinan, J. Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface. United States: N. p., 2006. Web. doi:10.1063/1.2166682.
Jaime-Vasquez, M, Martinka, M, Groenert, M, & Dinan, J. Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface. United States. https://doi.org/10.1063/1.2166682
Jaime-Vasquez, M, Martinka, M, Groenert, M, and Dinan, J. 2006. "Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface". United States. https://doi.org/10.1063/1.2166682.
@article{osti_20778623,
title = {Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface},
author = {Jaime-Vasquez, M and Martinka, M and Groenert, M and Dinan, J},
abstractNote = {The species and the nature of their chemical bonds at the surface of a hydrogen-terminated Si(211) wafer were characterized using temperature desorption spectroscopy, ion scattering spectroscopy, and electron spectroscopy. The surface region is dominated by monohydride species with dihydrides present in small amounts. Fluorine is distributed across the top layer as largely a physisorbed species to the Si substrate. Low-energy {sup 3}He{sup +} ions remove the H and F species with only minimal damage to the underlying region.},
doi = {10.1063/1.2166682},
url = {https://www.osti.gov/biblio/20778623}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 3,
volume = 88,
place = {United States},
year = {Mon Jan 16 00:00:00 EST 2006},
month = {Mon Jan 16 00:00:00 EST 2006}
}