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Title: Development of a 27.12 MHz radio frequency driven ion source with 3 mTorr operation pressure for neutron generators

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.2113782· OSTI ID:20723175
; ; ; ;  [1]
  1. Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)

An inductively coupled rf plasma ion source has been developed for neutron generators. The ion source configuration has been optimized for low pressure operation. Both 13.56 and 27.12 MHz rf powers have been used to generate hydrogen plasma. Experimental results show that 27.12 MHz operation is more efficient than 13.56 MHz in a low pressure region. The ion source can also be operated in pulsed mode. Current density higher than 30 mA/cm{sup 2} can be extracted from a 2-mm-diam aperture at 2 kW rf input power and 3 mTorr operation pressure.

OSTI ID:
20723175
Journal Information:
Review of Scientific Instruments, Vol. 76, Issue 10; Other Information: DOI: 10.1063/1.2113782; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English