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Title: Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors

Abstract

To establish of standard technique of nanolength measurement in a two-dimensional plane, a new (AFM) system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of the XYZ scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch, and yaw motion. In this article, an AFM system with minimum offset of XYZ sensing is designed. And, the XYZ scanning stage is designed to minimize the rotation angle because Abbe errors occur through the multiply of offset and rotation angle. For XY stage, optimal design is performed to minimize the rotation angle by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. For the Z stage, the optimal design of maximizing the first-resonant frequency is performed. When the resonant frequency increases, the scan speed is improved, thereby reducing errors caused by sensor drift. This article describes the procedures of selecting parameters for the optimal design. The full range of the XYZ scanner is 100 {mu}mx100 {mu}mx10 {mu}m. Based on the solution of the optimization problem, the XYZ scanner is fabricated. And tilting, pitch, and yaw motion are measured by autocollimatormore » to evaluate the performance of XY stage.« less

Authors:
; ; ; ;  [1]
  1. Department of Mechanical Engineering, KAIST, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701 (Korea, Republic of)
Publication Date:
OSTI Identifier:
20722967
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 76; Journal Issue: 7; Other Information: DOI: 10.1063/1.1978827; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ATOMIC FORCE MICROSCOPY; DESIGN; ERRORS; OPTIMIZATION; PERFORMANCE; ROTATION

Citation Formats

Kim, Dongmin, Kang, Dongwoo, Shim, Jongyeop, Song, Incheon, and Gweon, Daegab. Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors. United States: N. p., 2005. Web. doi:10.1063/1.1978827.
Kim, Dongmin, Kang, Dongwoo, Shim, Jongyeop, Song, Incheon, & Gweon, Daegab. Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors. United States. https://doi.org/10.1063/1.1978827
Kim, Dongmin, Kang, Dongwoo, Shim, Jongyeop, Song, Incheon, and Gweon, Daegab. 2005. "Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors". United States. https://doi.org/10.1063/1.1978827.
@article{osti_20722967,
title = {Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors},
author = {Kim, Dongmin and Kang, Dongwoo and Shim, Jongyeop and Song, Incheon and Gweon, Daegab},
abstractNote = {To establish of standard technique of nanolength measurement in a two-dimensional plane, a new (AFM) system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of the XYZ scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch, and yaw motion. In this article, an AFM system with minimum offset of XYZ sensing is designed. And, the XYZ scanning stage is designed to minimize the rotation angle because Abbe errors occur through the multiply of offset and rotation angle. For XY stage, optimal design is performed to minimize the rotation angle by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. For the Z stage, the optimal design of maximizing the first-resonant frequency is performed. When the resonant frequency increases, the scan speed is improved, thereby reducing errors caused by sensor drift. This article describes the procedures of selecting parameters for the optimal design. The full range of the XYZ scanner is 100 {mu}mx100 {mu}mx10 {mu}m. Based on the solution of the optimization problem, the XYZ scanner is fabricated. And tilting, pitch, and yaw motion are measured by autocollimator to evaluate the performance of XY stage.},
doi = {10.1063/1.1978827},
url = {https://www.osti.gov/biblio/20722967}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 7,
volume = 76,
place = {United States},
year = {Fri Jul 15 00:00:00 EDT 2005},
month = {Fri Jul 15 00:00:00 EDT 2005}
}