Multipoint focus-detecting method for measurement of biological nonsmooth surface topography

Journal Article · Sun May 15 00:00:00 EDT 2005 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1896947· OSTI ID:20722186

Yao, Hu; Lijiang, Zeng ^[1]

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1. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084 (China)

To measure the 3D characteristic of biological nonsmooth surface, a multipoint focus-detecting method based on the light splitting effect of crossed grating was developed. The surface profile is obtained by analyzing the variation in spot size on it rather than in light intensity used in conventional confocal method. Thus the influence of surface reflectivity variation could be reduced. The system is simple and the lateral resolution could be adjusted by changing the moving step of the stage on which the sample lies. Currently the axial uncertainty is about 20 {mu}m. The profile of fish scales was measured and the uncertainties were analyzed.

• OSTI ID: 20722186
• Journal Information: Review of Scientific Instruments, Vol. 76, Issue 5; Other Information: DOI: 10.1063/1.1896947; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BIOPHYSICS
DETECTION
FISH SCALES
MEASURING INSTRUMENTS
OPTICS
REFLECTIVITY
SPATIAL RESOLUTION
SURFACES
TOPOGRAPHY
VARIATIONS
VISIBLE RADIATION