Optical properties of magnetron-sputtered and rolled aluminum

Journal Article · Sat Oct 15 00:00:00 EDT 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2085315· OSTI ID:20719574

Van Gils, S; Dimogerontakis, Th; Buytaert, G; Stijns, E; Terryn, H; Skeldon, P; Thompson, G E; Alexander, M R ^[1]

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1. Department of Metallurgy, Electrochemistry and Materials Science, Vrije Universiteit Brussel, Pleinlaan 2, B-1050 Brussels (Belgium)

The optical properties of magnetron-sputtered aluminum and AA1050 aluminum alloy sheet have been examined qualitatively using total reflectance and quantitatively by means of visible spectroscopic ellipsometry (VISSE). Significant changes in reflectance and optical constants are observed, which are related to the incorporation of oxide in the aluminum bulk. The role of such oxide was determined by VISSE using the Bruggeman effective-medium approximation, with the findings validated by x-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy.

• OSTI ID: 20719574
• Journal Information: Journal of Applied Physics, Vol. 98, Issue 8; Other Information: DOI: 10.1063/1.2085315; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM
ALUMINIUM ALLOYS
ELLIPSOMETRY
OXIDES
REFLECTIVITY
ROLLING
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SHEETS
SPUTTERING
SURFACE COATING
THIN FILMS
VISIBLE SPECTRA
X-RAY PHOTOELECTRON SPECTROSCOPY