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Title: On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate

Abstract

The damage induced by 5 MeV oxygen ion implantation in x-cut congruent LiNbO{sub 3} has been investigated by Rutherford backscattering spectrometry channeling technique. The dynamics of the damage growth has been described by an analytical formula considering the separate contributions of nuclear and electronic energy deposition. It has been hypothesized that the nuclear damage provides the localization of the energy released to the electronic subsystem necessary for the conversion into atomic displacements. The strong influence of the preexisting defects on the damage pileup, foreseen by the analytical formula, has been experimentally verified by pre-implanting the samples with 500 keV oxygen ions. It has been shown that a subsequent 5 MeV oxygen implantation step gives rise to an impressive damage accumulation, eventually leading to the total amorphization of the surface, even at moderate fluences.

Authors:
; ; ; ; ; ; ; ;  [1]
  1. CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna (Italy)
Publication Date:
OSTI Identifier:
20702598
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 87; Journal Issue: 7; Other Information: DOI: 10.1063/1.2007855; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; AMORPHOUS STATE; ATOMIC DISPLACEMENTS; CHANNELING; CRYSTAL GROWTH; ION IMPLANTATION; LITHIUM COMPOUNDS; MEV RANGE 01-10; NIOBATES; NUCLEAR DAMAGE; OXYGEN IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY

Citation Formats

Bianconi, M, Argiolas, N, Bazzan, M, Bentini, G G, Chiarini, M, Cerutti, A, Mazzoldi, P, Pennestri, G, Sada, C, INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova, CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna, Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan, CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna, INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova, Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan, and INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova. On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate. United States: N. p., 2005. Web. doi:10.1063/1.2007855.
Bianconi, M, Argiolas, N, Bazzan, M, Bentini, G G, Chiarini, M, Cerutti, A, Mazzoldi, P, Pennestri, G, Sada, C, INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova, CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna, Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan, CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna, INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova, Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan, & INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova. On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate. United States. https://doi.org/10.1063/1.2007855
Bianconi, M, Argiolas, N, Bazzan, M, Bentini, G G, Chiarini, M, Cerutti, A, Mazzoldi, P, Pennestri, G, Sada, C, INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova, CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna, Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan, CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna, INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova, Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan, and INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova. 2005. "On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate". United States. https://doi.org/10.1063/1.2007855.
@article{osti_20702598,
title = {On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate},
author = {Bianconi, M and Argiolas, N and Bazzan, M and Bentini, G G and Chiarini, M and Cerutti, A and Mazzoldi, P and Pennestri, G and Sada, C and INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova and CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna and Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan and CNR-IMM-Sezione di Bologna, Via P.Gobetti 101, I-40139 Bologna and INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova and Carlo Gavazzi Space SPA, Via Gallarate 150, I-20151 Milan and INFM and Universita di Padova, Dipartimento di Fisica, Via Marzolo 8, I-35131 Padova},
abstractNote = {The damage induced by 5 MeV oxygen ion implantation in x-cut congruent LiNbO{sub 3} has been investigated by Rutherford backscattering spectrometry channeling technique. The dynamics of the damage growth has been described by an analytical formula considering the separate contributions of nuclear and electronic energy deposition. It has been hypothesized that the nuclear damage provides the localization of the energy released to the electronic subsystem necessary for the conversion into atomic displacements. The strong influence of the preexisting defects on the damage pileup, foreseen by the analytical formula, has been experimentally verified by pre-implanting the samples with 500 keV oxygen ions. It has been shown that a subsequent 5 MeV oxygen implantation step gives rise to an impressive damage accumulation, eventually leading to the total amorphization of the surface, even at moderate fluences.},
doi = {10.1063/1.2007855},
url = {https://www.osti.gov/biblio/20702598}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 7,
volume = 87,
place = {United States},
year = {Mon Aug 15 00:00:00 EDT 2005},
month = {Mon Aug 15 00:00:00 EDT 2005}
}