Aluminum nanocantilevers for high sensitivity mass sensors

Journal Article · Mon Jul 04 00:00:00 EDT 2005 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.1984092· OSTI ID:20702562

Davis, Zachary J; Boisen, Anja ^[1]

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1. Department of Micro and Nanotechnology (MIC), Technical University of Denmark (DTU), Building 345 East, 2800 Kgs. Lyngby (Denmark)

We have fabricated Al nanocantilevers using a simple, one mask contact UV lithography technique with lateral and vertical dimensions under 500 and 100 nm, respectively. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Furthermore, it is shown that Al has a potential higher sensitivity than Si based dynamic sensors. Initial testing of these devices has been conducted using a scanning electron microscope setup were the devices were tested under high vacuum conditions. The Q factor was measured to be approximately 200 and the mass sensitivity was measured to 2 ag/Hz by depositing electron-beam-induced carbon at the end of the nanocantilever.

• OSTI ID: 20702562
• Journal Information: Applied Physics Letters, Vol. 87, Issue 1; Other Information: DOI: 10.1063/1.1984092; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM
CARBON
ELECTRON BEAMS
MASS
NANOSTRUCTURES
SCANNING ELECTRON MICROSCOPY
SENSITIVITY
TESTING
ULTRAVIOLET RADIATION