Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing

Journal Article · Tue Mar 15 00:00:00 EST 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1861136· OSTI ID:20668240

Kim, K N; Jung, S J; Lee, Y J; Yeom, G Y; Lee, S H; Lee, J K ^[1]

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1. Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, 440-746 (Korea, Republic of)

An internal-type linear inductive antenna, that is, a double-comb-type antenna, was developed for a large-area plasma source having the size of 1020 mmx830 mm, and high density plasmas on the order of 2.3x10{sup 11} cm{sup -3} were obtained with 15 mTorr Ar at 5000 W of inductive power with good plasma stability. This is higher than that for the conventional serpentine-type antenna, possibly due to the low impedance, resulting in high efficiency of power transfer for the double-comb antenna type. In addition, due to the remarkable reduction of the antenna length, a plasma uniformity of less than 8% was obtained within the substrate area of 880 mmx660 mm at 5000 W without having a standing-wave effect.

• OSTI ID: 20668240
• Journal Information: Journal of Applied Physics, Vol. 97, Issue 6; Other Information: DOI: 10.1063/1.1861136; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ANTENNAS
ARGON
DISPLAY DEVICES
EFFICIENCY
IMPEDANCE
PLASMA
PLASMA DENSITY
PLASMA INSTABILITY
POWER RANGE 01-10 KW
PRESSURE RANGE PA
PROCESSING
SERPENTINE
STANDING WAVES
SUBSTRATES