Groove Density Measurements for the VLS grating by Diffraction Method

Journal Article · Wed May 12 00:00:00 EDT 2004 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.1757922· OSTI ID:20653079

Hu, Z W; Yu, X J; Liu, Z P; Wang, Q P ^[1]; Chen, Q ^[2]

---

1. NSRL, University of Science and Technology of China, Hefei, Anhui 230029 (China)
2. Legend Computer Systems Ltd (China)

A grating groove density measurement system is developed to measure the groove variation of VLS grating in NSRL. It has certain advantages over methods like Atomic force microscopy(AFM), Moire fringe method and long trace profiler(LTP). It is applicable to gratings of arbitrary surface shape and with arbitrary groove density distribution. The errors affecting the measurement accuracy are analyzed. The mechanical setup sketch is given. The mechanical accuracy is calibrated in order to control the uncertainty. The first result of a VLS plane grating is tested. The system accuracy ({delta}N/N) is about 2x10-4.

• OSTI ID: 20653079
• Journal Information: AIP Conference Proceedings, Vol. 705, Issue 1; Conference: 8. international conference on synchrotron radiation instrumentation, San Francisco, CA (United States), 25-29 Aug 2003; Other Information: DOI: 10.1063/1.1757922; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ACCURACY
ATOMIC FORCE MICROSCOPY
BEAM OPTICS
CONTROL
DENSITY
DIFFRACTION GRATINGS
DIFFRACTION METHODS
ERRORS
SYNCHROTRON RADIATION
X RADIATION
X-RAY DIFFRACTION