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Title: Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry

Abstract

A microwave-induced plasma (MIP) reactor has been constructed from a domestic microwave oven (DMO) and applied to the bulk synthesis of solid state compounds. Low pressure MIP can be initiated and maintained using a range of gases including Ar, N{sub 2}, NH{sub 3}, O{sub 2}, Cl{sub 2}, and H{sub 2}S. In order to obtain reproducible synthesis conditions the apparatus is designed to allow control of gas flow rate, gas composition, and pressure. The use of the reactor is demonstrated by the synthesis of three binary metal nitrides formed in a NH{sub 3} MIP. The reactions are rapid and the products show good crystallinity and phase purity as judged by powder x-ray diffraction.

Authors:
;  [1]
  1. Department of Chemistry, University of York, Heslington, York YO10 5DD (United Kingdom)
Publication Date:
OSTI Identifier:
20644044
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 75; Journal Issue: 12; Other Information: DOI: 10.1063/1.1821623; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; AMMONIA; CHLORINE; GAS FLOW; IMPURITIES; METALS; MICROWAVE OVENS; NITRIDES; PLASMA; PLASMA PRESSURE; RF SYSTEMS; SYNTHESIS; X-RAY DIFFRACTION

Citation Formats

Brooks, David J, and Douthwaite, Richard E. Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry. United States: N. p., 2004. Web. doi:10.1063/1.1821623.
Brooks, David J, & Douthwaite, Richard E. Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry. United States. https://doi.org/10.1063/1.1821623
Brooks, David J, and Douthwaite, Richard E. 2004. "Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry". United States. https://doi.org/10.1063/1.1821623.
@article{osti_20644044,
title = {Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry},
author = {Brooks, David J and Douthwaite, Richard E},
abstractNote = {A microwave-induced plasma (MIP) reactor has been constructed from a domestic microwave oven (DMO) and applied to the bulk synthesis of solid state compounds. Low pressure MIP can be initiated and maintained using a range of gases including Ar, N{sub 2}, NH{sub 3}, O{sub 2}, Cl{sub 2}, and H{sub 2}S. In order to obtain reproducible synthesis conditions the apparatus is designed to allow control of gas flow rate, gas composition, and pressure. The use of the reactor is demonstrated by the synthesis of three binary metal nitrides formed in a NH{sub 3} MIP. The reactions are rapid and the products show good crystallinity and phase purity as judged by powder x-ray diffraction.},
doi = {10.1063/1.1821623},
url = {https://www.osti.gov/biblio/20644044}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 12,
volume = 75,
place = {United States},
year = {Wed Dec 01 00:00:00 EST 2004},
month = {Wed Dec 01 00:00:00 EST 2004}
}