Effect of hydrogen passivation on charge storage in silicon quantum dots embedded in silicon nitride film
- Department of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 500-712 (Korea, Republic of)
The effect of hydrogen passivation on the charge storage characteristics of two types of silicon nitride films containing silicon quantum dots (Si QDs) grown by SiH{sub 4}+N{sub 2} and SiH{sub 4}+NH{sub 3} plasma was investigated. The transmission electron microscope analysis and the capacitance-voltage measurement showed that the silicon nitride film grown by SiH{sub 4}+NH{sub 3} plasma has a lower interface trap density and a higher density of Si QDs compared to that grown by SiH{sub 4}+N{sub 2} plasma. It was also found that the charge retention characteristics in the Si QDs were greatly enhanced in the samples grown by means of SiH{sub 4}+NH{sub 3} plasma, due to the hydrogen passivation of the defects in the silicon nitride films by NH{sub 3} during the growth of the Si QDs.
- OSTI ID:
- 20637076
- Journal Information:
- Applied Physics Letters, Vol. 86, Issue 14; Other Information: DOI: 10.1063/1.1894595; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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