Micropatterning of metal substrate by adhesive force lithography
- School of Chemical Engineering, Seoul National University, Seoul, 151-742 (Korea, Republic of)
We introduce adhesive force lithography (AFL), a detachment-based method for patterning metal surface. In this method, all the polymer layer except for the desired pattern gets lifted up from the metal surface. The craze microstructure unique to thin polymer films on the order of 10{sup 2} nm is utilized for this AFL along with a difference in adhesive force at two interfaces. Poly(urethaneacrylate) mold, which has a high enough work of adhesion with polymer, makes AFL effective. This technique is purely additive, fast ({approx}10 s contact time), and applicable to large area patterning (10 cmx10 cm)
- OSTI ID:
- 20637062
- Journal Information:
- Applied Physics Letters, Vol. 86, Issue 13; Other Information: DOI: 10.1063/1.1896429; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fabrication of micropatterned mesoporous silica film on a flexible polymer substrate through pattern transfer and subsequent photocalcination
Self-Cleaning Synthetic Adhesive Surfaces Mimicking Tokay Geckos.
Anti-adhesive characteristics of CHF{sub 3}/O{sub 2} and C{sub 4}F{sub 8}/O{sub 2} plasma-modified silicon molds for nanoimprint lithography
Journal Article
·
Sat Jul 15 00:00:00 EDT 2006
· Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
·
OSTI ID:20637062
+1 more
Self-Cleaning Synthetic Adhesive Surfaces Mimicking Tokay Geckos.
Technical Report
·
Wed Nov 01 00:00:00 EST 2006
·
OSTI ID:20637062
+4 more
Anti-adhesive characteristics of CHF{sub 3}/O{sub 2} and C{sub 4}F{sub 8}/O{sub 2} plasma-modified silicon molds for nanoimprint lithography
Journal Article
·
Tue Sep 15 00:00:00 EDT 2015
· Materials Research Bulletin
·
OSTI ID:20637062
+1 more