Two-photon absorption laser induced fluorescence on O and O{sub 3} in a dc plasma for oxidation of aluminum

Journal Article · Mon Nov 01 00:00:00 EST 2004 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.1807837· OSTI ID:20636793

Knechten, K; Kniknie, B J; Engeln, R; Swagten, H J.M.; Koopmans, B; Jonge, W J.M. de ^[1]

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1. Center for Nano Materials and COBRA Research Institute, Center for Plasma Physics and Radiation Technology, Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600MB Eindhoven (Netherlands)

It has been conjectured that atomic oxygen and ozone can have a great influence on the plasma oxidation of ultrathin aluminum for magnetic tunnel junctions. In order to measure the density of O and ozone, two-photon absorption laser induced fluorescence measurements are performed in the dc glow plasma that is used for the oxidation process. It was found that ozone is much more abundantly present compared to atomic oxygen. Using in situ, real-time ellipsometry measurements, we prove that ozone is not directly involved in the oxidation process.

• OSTI ID: 20636793
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 22, Issue 6; Other Information: DOI: 10.1116/1.1807837; (c) 2004 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION
ALUMINIUM
ELLIPSOMETRY
FLUORESCENCE
LASERS
OXIDATION
OXYGEN
OZONE
PHOTONS
PLASMA
THIN FILMS