Study of preferred orientation of zinc oxide films on the 64 deg. LiNbO{sub 3} substrates and their applications as liquid sensors

Journal Article · Mon Nov 01 00:00:00 EST 2004 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.1809125· OSTI ID:20636784

Jian, S -J; Chu, S -Y; Huang, T -Y; Water, Walter ^[1]

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1. Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan (China)

The preferred (002) orientation of zinc oxide (ZnO) films has been grown and demonstrated on 64 deg. LiNbO{sub 3} substrates using a rf magnetron sputtering system. The film orientations and crystallinity are strongly dependent on the rf power, total chamber pressure, ratio of argon to oxygen, and substrate temperature. We investigated the crystalline structure of the films by x-ray diffraction and scanning electron microscopy. Highly oriented (002) films were obtained under a total chamber pressure of 1.33 Pa, containing 40% oxygen and 60% argon, and a substrate temperature around 120 deg. C. Love-wave devices based on this structure (ZnO/IDTs/64 deg. LiNbO{sub 3}) are presented.

• OSTI ID: 20636784
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 22, Issue 6; Other Information: DOI: 10.1116/1.1809125; (c) 2004 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
CRYSTAL GROWTH
CRYSTAL STRUCTURE
GRAIN ORIENTATION
LITHIUM COMPOUNDS
MAGNETRONS
NIOBATES
OXYGEN
SCANNING ELECTRON MICROSCOPY
SPUTTERING
THIN FILMS
X-RAY DIFFRACTION
ZINC OXIDES