A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution
- Graduate School of Engineering, Tohoku University, 01Aza Aoba, Aramaki, Aobaku, Sendai 980-8579 (Japan)
A miniaturized biconvex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. A conventional polishing method could not manufacture the miniaturized, spherically convex shape, which is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80 000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid.
- OSTI ID:
- 20634301
- Journal Information:
- Applied Physics Letters, Vol. 85, Issue 13; Other Information: DOI: 10.1063/1.1796535; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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