Macroporous silicon membranes as electron and x-ray transmissive windows
- California Institute of Technology, 391 S. Holliston Avenue, Pasadena, California, 91125 (United States)
Macroporous silicon membranes are fabricated whose pores are terminated with 60 nm thin silicon dioxide shells. The transmission of electrons with energies of 5 kV-25 kV through these membranes was investigated reaching a maximum of 22% for 25 kV. Furthermore, the transmission of electromagnetic radiation ranging from the far-infrared to the x-ray region was determined. The results suggest the application of the membrane as window material for electron optics and energy dispersive x-ray detectors.
- OSTI ID:
- 20632727
- Journal Information:
- Applied Physics Letters, Vol. 85, Issue 7; Other Information: DOI: 10.1063/1.1772519; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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