Generation of large-volume, atmospheric-pressure, nonequilibrium plasmas
Journal Article
·
· IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers)
A review is presented of the issues associated with the generation of large-volume, high-pressure, nonequilibrium plasmas, as well as the approaches that have been developed for generating these plasmas using electrical discharges in gases. The various instabilities that have been overcome to obtain these plasmas as well as the techniques for quenching them are also reviewed. Last, recent efforts to obtain atmospheric pressure plasmas are discussed with particular emphasis on the capillary plasma electrode discharge, which the author has used to obtain high electron density nonequilibrium plasmas.
- Research Organization:
- Stevens Inst. of Tech., Hoboken, NJ (US)
- OSTI ID:
- 20067752
- Journal Information:
- IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers), Vol. 28, Issue 1; Other Information: PBD: Feb 2000; ISSN 0093-3813
- Country of Publication:
- United States
- Language:
- English
Similar Records
Etching process of silicon dioxide with nonequilibrium atmospheric pressure plasma
Numerical simulation of discharge structures in Ar/Cs nonequilibrium plasma MHD generator
Ultrahigh-speed etching of organic films using microwave-excited nonequilibrium atmospheric-pressure plasma
Journal Article
·
Fri Jul 01 00:00:00 EDT 2005
· Journal of Applied Physics
·
OSTI ID:20067752
+3 more
Numerical simulation of discharge structures in Ar/Cs nonequilibrium plasma MHD generator
Conference
·
Wed Jul 01 00:00:00 EDT 1998
·
OSTI ID:20067752
+1 more
Ultrahigh-speed etching of organic films using microwave-excited nonequilibrium atmospheric-pressure plasma
Journal Article
·
Mon Aug 15 00:00:00 EDT 2005
· Journal of Applied Physics
·
OSTI ID:20067752
+3 more