1,1-dimethylhydrazine as a high purity nitrogen source for MOVPE-water reduction and quantification using nuclear magnetic resonance, gas chromatography-atomic emission detection spectroscopy and cryogenic-mass spectroscopy analytical techniques
- and others
Hydrazine derivatives are attractive low temperature nitrogen sources for use in MOVPE due to their low thermal stability. However their purification and subsequent analysis has not previously been investigated in depth for this application. A detailed study on 1,1-dimethylhydrazine {l{underscore}brace}(CH{sub 3}){sub 2}N-NH{sub 2}{r{underscore}brace} purified by eight different methods and the subsequent quantitative measurements of water present in the samples obtained is reported here. A correlation between {sup 1}H nuclear magnetic resonance spectroscopy (NMR), gas chromatography-atomic emission detection (GC-AED) and cryogenic mass spectroscopy (Cryogenic-MS) has been performed. All three analysis techniques can be used to measure water in the samples and with the best purification the water content can be lowered well below 100 ppm. The high purity of this material has been demonstrated by growth results and the state-of-the-art performance of laser diodes.
- Research Organization:
- Epichem Ltd., Wirral (GB)
- Sponsoring Organization:
- European Commission (EC); USDOE
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 20015396
- Journal Information:
- Journal of Electronic Materials, Vol. 29, Issue 1; Conference: 5th Biennial Workshop on Organometallic Vapor Phase Epitaxy, Ponte Vedra Beach, Fl (US), 05/23/1999--05/27/1999; Other Information: PBD: Jan 2000; ISSN 0361-5235
- Country of Publication:
- United States
- Language:
- English
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