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Title: Semiconductors open a new niche for plasma researchers

Journal Article · · Science

This article describes a possible future niche for plasma researchers whose fusion program budgets have been slashed. The computer industry has a continuing need for chips with ever finer features, and semi-conductor makers are counting on improvements in a technique called plasma processing. Thousands of new technical and research jobs are likely to open in this area.

Sponsoring Organization:
USDOE
OSTI ID:
181927
Journal Information:
Science, Vol. 270, Issue 5240; Other Information: PBD: 24 Nov 1995
Country of Publication:
United States
Language:
English