Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering
Abstract
A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measured Rayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density and of about 150 K in temperature. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.
- Authors:
-
- Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven (Netherlands)
- Publication Date:
- OSTI Identifier:
- 165201
- Resource Type:
- Journal Article
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 66; Journal Issue: 5; Other Information: PBD: May 1995
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION; PLASMA DIAGNOSTICS; THOMSON SCATTERING; ELECTRIC DISCHARGES; RAYLEIGH SCATTERING; RAMAN SPECTRA; ELECTRON DENSITY; CALIBRATION; ELECTRON TEMPERATURE; ARGON
Citation Formats
de Regt, J M, Engeln, R A.H., de Groote, F P.J., van der Mullen, J A.M., and Schram, D C. Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering. United States: N. p., 1995.
Web. doi:10.1063/1.1146444.
de Regt, J M, Engeln, R A.H., de Groote, F P.J., van der Mullen, J A.M., & Schram, D C. Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering. United States. https://doi.org/10.1063/1.1146444
de Regt, J M, Engeln, R A.H., de Groote, F P.J., van der Mullen, J A.M., and Schram, D C. 1995.
"Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering". United States. https://doi.org/10.1063/1.1146444.
@article{osti_165201,
title = {Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering},
author = {de Regt, J M and Engeln, R A.H. and de Groote, F P.J. and van der Mullen, J A.M. and Schram, D C},
abstractNote = {A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measured Rayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density and of about 150 K in temperature. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.},
doi = {10.1063/1.1146444},
url = {https://www.osti.gov/biblio/165201},
journal = {Review of Scientific Instruments},
number = 5,
volume = 66,
place = {United States},
year = {Mon May 01 00:00:00 EDT 1995},
month = {Mon May 01 00:00:00 EDT 1995}
}
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