Laser-Micromachined and Laminated Microfluidic Components for Miniaturized Thermal, Chemical and Biological Systems
- BATTELLE (PACIFIC NW LAB)
Microchannel microfluidic components are being developed for heat transfer, chemical reactor, chemical analysis, and biological analytical applications. Specific applications include chemical sensing, DNA replication, blodd analysis, capillary electrophoresis, fuel cell reactors, high temperature chemical reactors, heat pumps, combustors, and fuel processors. Two general types of component architectures have been developed and the fabrication processes defined. All involve a lamination scheme using plastic, ceramic, or metal laminates, as opposed to planar components. The first type is a stacked architecture that utilizes functionality built in each layer, with fluid flow interconnects between layers. Each layer of the laminate has specific microchannel geometry, and performs a specific function (such as mixing, heat exchange, or chemical reaction). Polymeric materials are used primarily. Fabrication processes used are laser micromaching, wet and dry etching, and coating deposition. T he laminates can also be micromolded plastics. The second architecture employs laminates to form internal microchannels and interconnects. Materials include ceramic tapes and high temperature metals. Catalysts can be placed in the microchannels. Fabrication processes used are diffusion bonding, ceramic bonding and firing, photochemical etching, and electrochemical micromaching. Bonding, thus sealing, the laminates is an important issue. Process conditions have been developed to reduce distortion of the laminates and to hermetically seal the components.
- Research Organization:
- Pacific Northwest National Lab., Richland, WA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC06-76RL01830
- OSTI ID:
- 15001859
- Report Number(s):
- PNNL-SA-30686; TRN: US200406%%294
- Resource Relation:
- Conference: Design, Test, and Microfabrication of MEMS and MOEMS, Conference location not given, Conference dates not given; Other Information: PBD: 1 Jan 1999
- Country of Publication:
- United States
- Language:
- English
Similar Records
Sputtered coatings for microfluidic applications
Quantum dot-based microfluidic biosensor for cancer detection