skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings

Abstract

An interference-diffractometric method for measuring the groove spacing of diffraction gratings (periodical standards of small length) and a method for examining the quality of diffraction gratings are developed and investigated. They are based on the holographic method of controlling the sensitivity of the interference measurements using the repeat recording of holograms with compensation for the aberrations of the optical system. Measurements of the groove spacing (398 nm) of the holographic grating were performed with an error of 5 nm. 4 refs., 4 figs.

Authors:
; ;  [1]
  1. All-Russian Mendeleev Research Institute, St. Petersburg (Russian Federation); and others
Publication Date:
OSTI Identifier:
146146
Resource Type:
Journal Article
Journal Name:
Optics and Spectroscopy
Additional Journal Information:
Journal Volume: 77; Journal Issue: 1; Other Information: PBD: Jul 1994; TN: Translated from Optika i Spektroskopiya; 77: No. 1, 145-151(1994)
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 66 PHYSICS; GRATINGS; MEASURING METHODS; DIFFRACTION; HOLOGRAPHY; OPTICAL SYSTEMS; DIFFRACTOMETERS

Citation Formats

Vitushkin, L F, Zeilikovich, I S, and Korotkov, V I. High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings. United States: N. p., 1994. Web.
Vitushkin, L F, Zeilikovich, I S, & Korotkov, V I. High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings. United States.
Vitushkin, L F, Zeilikovich, I S, and Korotkov, V I. 1994. "High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings". United States.
@article{osti_146146,
title = {High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings},
author = {Vitushkin, L F and Zeilikovich, I S and Korotkov, V I},
abstractNote = {An interference-diffractometric method for measuring the groove spacing of diffraction gratings (periodical standards of small length) and a method for examining the quality of diffraction gratings are developed and investigated. They are based on the holographic method of controlling the sensitivity of the interference measurements using the repeat recording of holograms with compensation for the aberrations of the optical system. Measurements of the groove spacing (398 nm) of the holographic grating were performed with an error of 5 nm. 4 refs., 4 figs.},
doi = {},
url = {https://www.osti.gov/biblio/146146}, journal = {Optics and Spectroscopy},
number = 1,
volume = 77,
place = {United States},
year = {Fri Jul 01 00:00:00 EDT 1994},
month = {Fri Jul 01 00:00:00 EDT 1994}
}