High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings
Abstract
An interference-diffractometric method for measuring the groove spacing of diffraction gratings (periodical standards of small length) and a method for examining the quality of diffraction gratings are developed and investigated. They are based on the holographic method of controlling the sensitivity of the interference measurements using the repeat recording of holograms with compensation for the aberrations of the optical system. Measurements of the groove spacing (398 nm) of the holographic grating were performed with an error of 5 nm. 4 refs., 4 figs.
- Authors:
-
- All-Russian Mendeleev Research Institute, St. Petersburg (Russian Federation); and others
- Publication Date:
- OSTI Identifier:
- 146146
- Resource Type:
- Journal Article
- Journal Name:
- Optics and Spectroscopy
- Additional Journal Information:
- Journal Volume: 77; Journal Issue: 1; Other Information: PBD: Jul 1994; TN: Translated from Optika i Spektroskopiya; 77: No. 1, 145-151(1994)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 66 PHYSICS; GRATINGS; MEASURING METHODS; DIFFRACTION; HOLOGRAPHY; OPTICAL SYSTEMS; DIFFRACTOMETERS
Citation Formats
Vitushkin, L F, Zeilikovich, I S, and Korotkov, V I. High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings. United States: N. p., 1994.
Web.
Vitushkin, L F, Zeilikovich, I S, & Korotkov, V I. High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings. United States.
Vitushkin, L F, Zeilikovich, I S, and Korotkov, V I. 1994.
"High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings". United States.
@article{osti_146146,
title = {High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings},
author = {Vitushkin, L F and Zeilikovich, I S and Korotkov, V I},
abstractNote = {An interference-diffractometric method for measuring the groove spacing of diffraction gratings (periodical standards of small length) and a method for examining the quality of diffraction gratings are developed and investigated. They are based on the holographic method of controlling the sensitivity of the interference measurements using the repeat recording of holograms with compensation for the aberrations of the optical system. Measurements of the groove spacing (398 nm) of the holographic grating were performed with an error of 5 nm. 4 refs., 4 figs.},
doi = {},
url = {https://www.osti.gov/biblio/146146},
journal = {Optics and Spectroscopy},
number = 1,
volume = 77,
place = {United States},
year = {Fri Jul 01 00:00:00 EDT 1994},
month = {Fri Jul 01 00:00:00 EDT 1994}
}
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