Ion irradiation induced structural modifications and increase in elastic modulus of silica based thin films

Shojaee, S. A.; Qi, Y.; Wang, Y. Q.; Mehner, A.; Lucca, D. A.

doi:10.1038/srep40100

Title: Ion irradiation induced structural modifications and increase in elastic modulus of silica based thin films

Journal Article · Tue Jan 10 00:00:00 EST 2017 · Scientific Reports

DOI:https://doi.org/10.1038/srep40100· OSTI ID:1396137

Shojaee, S. A. ^[1]; Qi, Y. ^[1];

^[2]; Mehner, A. ^[3]; Lucca, D. A. ^[1]

Oklahoma State Univ., Stillwater, OK (United States). School of Mechanical and Aerospace Engineering
Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Science and Technology Division
Foundation Inst. of Materials Engineering, Bremen (Germany)

Ion irradiation is an alternative to heat treatment for transforming organic-inorganic thin films to a ceramic state. One major shortcoming in previous studies of ion-irradiated films is the assumption that constituent phases in ion-irradiated and heat-treated films are identical and that the ion irradiation effect is limited to changes in composition. Here, we investigate the effects of ion irradiation on both the composition and structure of constituent phases and use the results to explain the measured elastic modulus of the films. Our results indicated that the microstructure of the irradiated films consisted of carbon clusters within a silica matrix. It was found that carbon was present in a non-graphitic sp²-bonded configuration. It was also observed that ion irradiation caused a decrease in the Si-O-Si bond angle of silica, similar to the effects of applied pressure. A phase transformation from tetrahedrally bonded to octahedrally bonded silica was also observed. The results indicated the incorporation of carbon within the silica network. Finally, a combination of the decrease in Si-O-Si bond angle and an increase in the carbon incorporation within the silica network was found to be responsible for the increase in the elastic modulus of the films.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

Sponsoring Organization:: USDOE Office of Science (SC). Basic Energy Sciences (BES) (SC-22); USDOE National Nuclear Security Administration (NNSA); National Science Foundation (NSF)

Grant/Contract Number:: AC52-06NA25396; OISE-0352377; OISE-0128050

OSTI ID:: 1396137

Report Number(s):: LA-UR-17-27527

Journal Information:: Scientific Reports, Vol. 7; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 27 works

Citation information provided by
Web of Science

References (86)

Raman Spectroscopy of Si $O_{2}$ Glass at High Pressure Hemley, R. J.; Mao, H. K.; Bell, P. M. Physical Review Letters, Vol. 57, Issue 6 https://doi.org/10.1103/PhysRevLett.57.747	journal	August 1986
Densification of a continuous random network model of amorphous SiO ₂ glass Li, Neng; Sakidja, Ridwan; Aryal, Sitaram Phys. Chem. Chem. Phys., Vol. 16, Issue 4 https://doi.org/10.1039/C3CP53192A	journal	January 2014
Modulus–density scaling behaviour and framework architecture of nanoporous self-assembled silicas Fan, Hongyou; Hartshorn, Christopher; Buchheit, Thomas Nature Materials, Vol. 6, Issue 6 https://doi.org/10.1038/nmat1913	journal	May 2007
The mechanical properties of the SiOC(H) composite thin films with a low dielectric constant Lee, Hean Ju; Oh, Kyoung Suk; Choi, Chi Kyu Surface and Coatings Technology, Vol. 171, Issue 1-3 https://doi.org/10.1016/S0257-8972(03)00289-5	journal	July 2003
Vibrational dynamics and structure of graphitic amorphous carbon modeled using an embedded-ring approach Doyle, T. E.; Dennison, J. R. Physical Review B, Vol. 51, Issue 1 https://doi.org/10.1103/physrevb.51.196	journal	January 1995
Effects of ion irradiation on the mechanical properties of SiNawOxCyHz sol–gel derived thin films Lucca, D. A.; Qi, Y.; Harriman, T. A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 19 https://doi.org/10.1016/j.nimb.2010.05.010	journal	October 2010
Optical Phonons in Amorphous Silicon Oxides. I. Calculation of the Density of States and Interpretation of LoTo Splittings of Amorphous Sio2 Lehmann, A.; Schumann, L.; Hübner, K. physica status solidi (b), Vol. 117, Issue 2 https://doi.org/10.1002/pssb.2221170231	journal	June 1983
²⁹ Si and ¹³ C Solid-State NMR Spectroscopic Study of Nanometer-Scale Structure and Mass Fractal Characteristics of Amorphous Polymer Derived Silicon Oxycarbide Ceramics Widgeon, S. J.; Sen, S.; Mera, G. Chemistry of Materials, Vol. 22, Issue 23 https://doi.org/10.1021/cm1021432	journal	December 2010
Interpretation of Raman spectra of disordered and amorphous carbon Ferrari, A. C.; Robertson, J. Physical Review B, Vol. 61, Issue 20, p. 14095-14107 https://doi.org/10.1103/PhysRevB.61.14095	journal	May 2000
Hydrogen loss under heavy ion irradiation in polymers Mittal, V. K.; Lotha, S.; Avasthi, D. K. Radiation Effects and Defects in Solids, Vol. 147, Issue 3 https://doi.org/10.1080/10420159908229009	journal	January 1999
Mechanical properties of polyhedral oligomeric silsesquioxane (POSS) thin films submitted to Si irradiation Foerster, C. E.; Serbena, F. C.; Garcia, I. T. S. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 218 https://doi.org/10.1016/j.nimb.2004.01.011	journal	June 2004
SiOC glasses produced from silsesquioxanes by the aerosol-assisted vapor synthesis method Sitarz, M.; Czosnek, C.; Jeleń, P. Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, Vol. 112 https://doi.org/10.1016/j.saa.2013.05.007	journal	August 2013
Fringes in FTIR spectroscopy revisited: understanding and modelling fringes in infrared spectroscopy of thin films Konevskikh, Tatiana; Ponossov, Arkadi; Blümel, Reinhold The Analyst, Vol. 140, Issue 12 https://doi.org/10.1039/C4AN02343A	journal	January 2015
MeV H+ ion irradiation effect on the stoichiometry of polyethylene terephthalate films Abdesselam, M.; Muller, D.; Djebara, M. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 307 https://doi.org/10.1016/j.nimb.2013.02.052	journal	July 2013
Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films Lucca, D. A.; Ghisleni, R.; Lee, J. -K. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 266, Issue 10 https://doi.org/10.1016/j.nimb.2008.03.022	journal	May 2008
Sixfold-Coordinated Amorphous Polymorph of ${SiO}_{2}$ under High Pressure Sato, Tomoko; Funamori, Nobumasa Physical Review Letters, Vol. 101, Issue 25 https://doi.org/10.1103/PhysRevLett.101.255502	journal	December 2008
SiO2 in 6:3 (stishovite) and 4:2 Co-ordination—Characterization by core level spectroscopy (XPS/XAES) Finster, J. Surface and Interface Analysis, Vol. 12, Issue 5 https://doi.org/10.1002/sia.740120507	journal	July 1988
Thermochemical Data for CVD Modeling from Ab initio Calculations Ho, Pauline; Melius, Carl F. MRS Proceedings, Vol. 335 https://doi.org/10.1557/proc-335-131	journal	January 1993
Mechanism of MeV ion induced hydrogen depletion from organic layers Marée, C. H. M.; Vredenberg, A. M.; Habraken, F. H. P. M. Materials Chemistry and Physics, Vol. 46, Issue 2-3 https://doi.org/10.1016/S0254-0584(97)80014-4	journal	November 1996
Comparison of Ion Irradiation Effects in Silicon-Based Preceramic Thin Films Pivin, Jean C.; Colombo, Paolo; Sorarù, Gian D. Journal of the American Ceramic Society, Vol. 83, Issue 4 https://doi.org/10.1111/j.1151-2916.2000.tb01264.x	journal	April 2000
Theoretical Study of the Thermochemistry of Molecules in the Si-O-H-C System Ho, Pauline; Melius, Carl F. The Journal of Physical Chemistry, Vol. 99, Issue 7 https://doi.org/10.1021/j100007a056	journal	February 1995
1430 cm−1 Raman line in ion implanted carbon rich amorphous silicon carbide Compagnini, G.; Foti, G. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 127-128 https://doi.org/10.1016/s0168-583x(96)01143-3	journal	May 1997
Direct evaluation of the sp3 content in diamond-like-carbon films by XPS Mérel, P.; Tabbal, M.; Chaker, M. Applied Surface Science, Vol. 136, Issue 1-2 https://doi.org/10.1016/S0169-4332(98)00319-5	journal	October 1998
High-pressure x-ray diffraction of ${SiO}_{2}$ glass Meade, Charles; Hemley, R. J.; Mao, H. K. Physical Review Letters, Vol. 69, Issue 9 https://doi.org/10.1103/PhysRevLett.69.1387	journal	August 1992
Crystallization Maps for SiCO Amorphous Ceramics Saha, Atanu; Raj, Rishi Journal of the American Ceramic Society, Vol. 90, Issue 2 https://doi.org/10.1111/j.1551-2916.2006.01423.x	journal	February 2007
Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene Lee, C.; Wei, X.; Kysar, J. W. Science, Vol. 321, Issue 5887, p. 385-388 https://doi.org/10.1126/science.1157996	journal	July 2008
Nanoindentation: Measuring methods and applications Lucca, D. A.; Herrmann, K.; Klopfstein, M. J. CIRP Annals, Vol. 59, Issue 2 https://doi.org/10.1016/j.cirp.2010.05.009	journal	January 2010
Comment on “Sixfold-Coordinated Amorphous Polymorph ofSiO2under High Pressure” Brazhkin, V. V. Physical Review Letters, Vol. 102, Issue 20 https://doi.org/10.1103/physrevlett.102.209603	journal	May 2009
Direct evidence for homonuclear bonds in amorphous SiC Gorman, M.; Solin, S. A. Solid State Communications, Vol. 15, Issue 4 https://doi.org/10.1016/0038-1098(74)90256-7	journal	August 1974
Raman scattering investigation of C-doped a-SiO ₂ after high energy heavy ion irradiations Liu, Chun-Bao; Wang, Zhi-Guang Chinese Physics C, Vol. 35, Issue 9 https://doi.org/10.1088/1674-1137/35/9/019	journal	September 2011
Elastic Properties of Glasses Ernsberger, F. M. Glass Science and Technology https://doi.org/10.1016/B978-0-12-706705-6.50006-0	book	January 1980
Swift heavy ion amorphization of quartz — a comparative study of the particle amorphization mechanism of quartz Douillard, L.; Duraud, J. P. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 107, Issue 1-4 https://doi.org/10.1016/0168-583X(95)01044-0	journal	February 1996
Molecular depth profiling of polymers with very low energy reactive ions Houssiau, L.; Mine, N. Surface and Interface Analysis, Vol. 42, Issue 8 https://doi.org/10.1002/sia.3159	journal	March 2010
Thermal Decomposition of Tetramethyl Orthosilicate in the Gas Phase: An Experimental and Theoretical Study of the Initiation Process Chu, J. C. S.; Soller, R.; Lin, M. C. The Journal of Physical Chemistry, Vol. 99, Issue 2 https://doi.org/10.1021/j100002a034	journal	January 1995
Polymer-derived SiCN and SiOC ceramics – structure and energetics at the nanoscale Mera, Gabriela; Navrotsky, Alexandra; Sen, Sabyasachi Journal of Materials Chemistry A, Vol. 1, Issue 12 https://doi.org/10.1039/c2ta00727d	journal	January 2013
Infrared spectroscopy study of low-dielectric-constant fluorine-incorporated and carbon-incorporated silicon oxide films Kim, Yoon-Hae; Hwang, Moo Sung; Kim, Hyeong Joon Journal of Applied Physics, Vol. 90, Issue 7 https://doi.org/10.1063/1.1402152	journal	October 2001
Optical and electrical properties of nonstoichiometric a-Ge1−xCx films prepared by magnetron co-sputtering Zhu, J. Q.; Jiang, C. Z.; Han, J. C. Applied Surface Science, Vol. 258, Issue 8 https://doi.org/10.1016/j.apsusc.2011.12.051	journal	February 2012
Radiolysis and defect structure in electron-irradiated α-quartz Hobbs, L. W.; Pascucci, M. R. Le Journal de Physique Colloques, Vol. 41, Issue C6 https://doi.org/10.1051/jphyscol:1980660	journal	July 1980
Modification of Plasma-Polymerized Organosiloxane Films by Irradiation with He ⁺ , Ne ⁺ , Ar ⁺ , and Kr ⁺ Ions Gelamo, R. V.; Bica de Moraes, M. A.; Trasferetti, B. C. Chemistry of Materials, Vol. 17, Issue 23 https://doi.org/10.1021/cm051007o	journal	November 2005
Elastic Moduli of Permanently Densified Silica Glasses Deschamps, T.; Margueritat, J.; Martinet, C. Scientific Reports, Vol. 4, Issue 1 https://doi.org/10.1038/srep07193	journal	November 2014
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments Oliver, W. C.; Pharr, G. M. Journal of Materials Research, Vol. 7, Issue 06, p. 1564-1583 https://doi.org/10.1557/JMR.1992.1564	journal	June 1992
White Luminescence from Solâ€“Gel-Derived SiOC Thin Films Karakuscu, Aylin; Guider, Romain; Pavesi, Lorenzo Journal of the American Ceramic Society, Vol. 92, Issue 12 https://doi.org/10.1111/j.1551-2916.2009.03343.x	journal	December 2009
Effects of ion beam treatment on atomic and macroscopic adhesion of copper to different polymer materials Zaporojtchenko, V.; Zekonyte, J.; Faupel, F. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 265, Issue 1 https://doi.org/10.1016/j.nimb.2007.08.040	journal	December 2007
Synthesis of novel inorganic films by ion beam irradiation of polymer films Venkatesan, T.; Wolf, T.; Allara, D. Applied Physics Letters, Vol. 43, Issue 10 https://doi.org/10.1063/1.94186	journal	November 1983
Growth and thermal annealing of amorphous germanium carbide obtained by X-ray chemical vapor deposition Demaria, C.; Benzi, P.; Arrais, A. Journal of Materials Science, Vol. 48, Issue 18 https://doi.org/10.1007/s10853-013-7435-1	journal	May 2013
Octahedral conversion of a-SiO ₂ host matrix by pulsed ion implantation: Octahedral conversion of a-SiO ₂ -host matrix Zatsepin, D. A.; Zatsepin, A. F.; Boukhvalov, D. W. physica status solidi (b), Vol. 252, Issue 10 https://doi.org/10.1002/pssb.201552103	journal	June 2015
Raman spectroscopy of hydrogenated amorphous carbons Casiraghi, C.; Ferrari, A. C.; Robertson, J. Physical Review B, Vol. 72, Issue 8 https://doi.org/10.1103/PhysRevB.72.085401	journal	August 2005
Silicon-containing polymer-derived ceramic nanocomposites (PDC-NCs): preparative approaches and properties Ionescu, Emanuel; Kleebe, Hans-Joachim; Riedel, Ralf Chemical Society Reviews, Vol. 41, Issue 15 https://doi.org/10.1039/c2cs15319j	journal	January 2012
Fabrication of carbon nanostructures (nanodots, nanowires) by energetic ion irradiation Kumar, Amit; Singh, Fouran; Pivin, J. C. Journal of Physics D: Applied Physics, Vol. 40, Issue 7 https://doi.org/10.1088/0022-3727/40/7/033	journal	March 2007
Investigation of hydrogen concentration and hardness of ion irradiated organically modified silicate thin films Qi, Y.; Prenzel, T.; Harriman, T. A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12 https://doi.org/10.1016/j.nimb.2010.02.116	journal	June 2010
High-pressure structural transformation of ${SiO}_{2}$ glass up to 100 GPa Sato, Tomoko; Funamori, Nobumasa Physical Review B, Vol. 82, Issue 18 https://doi.org/10.1103/PhysRevB.82.184102	journal	November 2010
Hardness and Young's modulus of amorphous a -SiC thin films determined by nanoindentation and bulge tests El Khakani, M. A.; Chaker, M.; Jean, A. Journal of Materials Research, Vol. 9, Issue 1 https://doi.org/10.1557/JMR.1994.0096	journal	January 1994
The production of graphene nanosheets decorated with silver nanoparticles for use in transparent, conductive films Tien, Hsi-Wen; Huang, Yuan-Li; Yang, Shin-Yi Carbon, Vol. 49, Issue 5 https://doi.org/10.1016/j.carbon.2010.12.022	journal	April 2011
Densification of silica glass at ambient pressure Zheng, Lianqing; An, Qi; Fu, Rongshan The Journal of Chemical Physics, Vol. 125, Issue 15 https://doi.org/10.1063/1.2358130	journal	October 2006
Visible photoluminescence of ion irradiated polysiloxane films Pivin, J. C.; Sendova-Vassileva, M. Solid State Communications, Vol. 106, Issue 3 https://doi.org/10.1016/s0038-1098(98)00016-7	journal	April 1998
Hydrogen loss in $a - S i : C : H$ layers induced by MeV ion beam irradiation Ullersma, E. H. C.; Ullersma, P.; Habraken, F. H. P. M. Physical Review B, Vol. 61, Issue 15 https://doi.org/10.1103/PhysRevB.61.10133	journal	April 2000
Pressureless synthesis of fully dense and crack-free SiOC bulk ceramics via photo-crosslinking and pyrolysis of a polysiloxane Martínez-Crespiera, Sandra; Ionescu, Emanuel; Kleebe, Hans-Joachim Journal of the European Ceramic Society, Vol. 31, Issue 5 https://doi.org/10.1016/j.jeurceramsoc.2010.11.019	journal	May 2011
High-pressure infrared sepctra of ∝ -quartz, coesite, stishovite and silica glass Williams, Q.; Hemley, R. J.; Kruger, M. B. Journal of Geophysical Research: Solid Earth, Vol. 98, Issue B12 https://doi.org/10.1029/93JB02171	journal	December 1993
X-ray fluorescence study of organic-inorganic polymer conversion into ceramics induced by ion irradiation Kurmaev, E. Z.; Moewes, A.; Krietemeyer, M. Physical Review B, Vol. 60, Issue 22 https://doi.org/10.1103/physrevb.60.15100	journal	December 1999
Stable SiOC/Sn Nanocomposite Anodes for Lithium-Ion Batteries with Outstanding Cycling Stability Kaspar, Jan; Terzioglu, Caglar; Ionescu, Emanuel Advanced Functional Materials, Vol. 24, Issue 26 https://doi.org/10.1002/adfm.201303828	journal	March 2014
Study on evolution of gases from Mylar under ion irradiation Avasthi, D. K.; Singh, J. P.; Biswas, A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 146, Issue 1-4 https://doi.org/10.1016/s0168-583x(98)00464-9	journal	December 1998
Vibrational Spectroscopy in Ion–Irradiated Carbon–Based Thin Films Compagnini, Giuseppe; Puglisi, Orazio; Baratta, Giuseppe A. Carbon. Topics in Applied Physics https://doi.org/10.1007/11378235_24	book	January 2006
Effects of heat treatment and ion irradiation on hybrid organic/inorganic sol–gel derived thin films Ghisleni, R.; Shao, L.; Lucca, D. A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 261, Issue 1-2 https://doi.org/10.1016/j.nimb.2007.04.045	journal	August 2007
Raman spectra of partially oriented sp2 carbon films: Experimental and modelled Tarrant, R. N.; Warschkow, O.; McKenzie, D. R. Vibrational Spectroscopy, Vol. 41, Issue 2 https://doi.org/10.1016/j.vibspec.2006.06.005	journal	August 2006
High-energy ion-beam-induced phase separation in $Si O_{x}$ films Arnoldbik, W. M.; Tomozeiu, N.; van Hattum, E. D. Physical Review B, Vol. 71, Issue 12 https://doi.org/10.1103/PhysRevB.71.125329	journal	March 2005
Vacancy-induced densification of silica glass An, Qi; Zheng, Lianqing; Luo, Sheng-Nian Journal of Non-Crystalline Solids, Vol. 352, Issue 30-31 https://doi.org/10.1016/j.jnoncrysol.2006.04.024	journal	September 2006
Precipitation of semiconducting carbon nanoparticles in ion irradiated gels Kumar, Amit; Singh, F.; Khan, S. A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 244, Issue 1 https://doi.org/10.1016/j.nimb.2005.11.076	journal	March 2006
Reconstruction of the SiO ₂ structure damaged by low-energy Ar-implanted ions Garrido, B.; Samitier, J.; Bota, S. Journal of Applied Physics, Vol. 81, Issue 1 https://doi.org/10.1063/1.363998	journal	January 1997
Carbon clustering in Si1−xCx formed by ion implantation Calcagno, L.; Compagnini, G.; Foti, G. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 120, Issue 1-4 https://doi.org/10.1016/S0168-583X(96)00492-2	journal	December 1996
Structural and topological changes in silica glass at pressure Benmore, C. J.; Soignard, E.; Amin, S. A. Physical Review B, Vol. 81, Issue 5 https://doi.org/10.1103/PhysRevB.81.054105	journal	February 2010
High pressure elastic and plastic deformations of silica: In situ diamond anvil cell Raman experiments Champagnon, B.; Martinet, C.; Boudeulle, M. Journal of Non-Crystalline Solids, Vol. 354, Issue 2-9 https://doi.org/10.1016/j.jnoncrysol.2007.07.079	journal	January 2008
Spectroscopic Evidence for Pressure-Induced Coordination Changes in Silicate Glasses and Melts Williams, Q.; Jeanloz, R. Science, Vol. 239, Issue 4842 https://doi.org/10.1126/science.239.4842.902	journal	February 1988
Ion irradiation induced surface modification studies of polymers using SPM Tripathi, A.; Kumar, Amit; Singh, F. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 236, Issue 1-4 https://doi.org/10.1016/j.nimb.2005.04.059	journal	July 2005
Structure, dynamics, and electronic properties of diamondlike amorphous carbon Wang, C. Z.; Ho, K. M. Physical Review Letters, Vol. 71, Issue 8 https://doi.org/10.1103/PhysRevLett.71.1184	journal	August 1993
Mechanical Characterization of Sol-Gel-Derived Silicon Oxycarbide Glasses Soraru, Gian Domenico; Dallapiccola, Elisabetta; D'Andrea, Gennaro Journal of the American Ceramic Society, Vol. 79, Issue 8 https://doi.org/10.1111/j.1151-2916.1996.tb08939.x	journal	August 1996
Photoluminescence and Raman spectroscopy in hydrogenated carbon films Marchon, B.; Grannen, K. IEEE Transactions on Magnetics, Vol. 33, Issue 5 https://doi.org/10.1109/20.617873	journal	January 1997
XPS characterization of gel-derived silicon oxycarbide glasses Sorarù, Gian Domenico; D'Andrea, Gennaro; Glisenti, Antonella Materials Letters, Vol. 27, Issue 1-2 https://doi.org/10.1016/0167-577X(95)00245-6	journal	May 1996
Evaluation of the sp2/sp3 ratio in amorphous carbon structure by XPS and XAES Lascovich, J. C.; Giorgi, R.; Scaglione, S. Applied Surface Science, Vol. 47, Issue 1 https://doi.org/10.1016/0169-4332(91)90098-5	journal	January 1991
A solid state 29Si and 13C NMR study on the synthesis of thin silicon–oxycarbide glass sheets by a sol–gel route Suyal, N.; Hoebbel, D.; Mennig, M. Journal of Materials Chemistry, Vol. 9, Issue 12 https://doi.org/10.1039/a908089i	journal	January 1999
Incorporation and stability of carbon during low-temperature epitaxial growth of Ge1−xCx (x<0.1) alloys on Si(100): Microstructural and Raman studies Yang, B. -K.; Krishnamurthy, M.; Weber, W. H. Journal of Applied Physics, Vol. 82, Issue 7 https://doi.org/10.1063/1.365636	journal	October 1997
Infrared spectroscopy of sol–gel derived silica-based films: a spectra-microstructure overview Innocenzi, Plinio Journal of Non-Crystalline Solids, Vol. 316, Issue 2-3 https://doi.org/10.1016/S0022-3093(02)01637-X	journal	February 2003
Silicon-Based Polymer-Derived Ceramics: Synthesis Properties and Applications-A Review: Dedicated to Prof. Dr. Fritz Aldinger on the occasion of his 65th birthday [ポリマーから誘導されたケイ素系セラミックス ─合成・性質・応用に関する総説─: Dedicated to Prof. Dr. Fritz Aldinger on the occasion of his 65th birthday] Riedel, Ralf; Mera, Gabriela; Hauser, Ralf Journal of the Ceramic Society of Japan, Vol. 114, Issue 1330 https://doi.org/10.2109/jcersj.114.425	journal	January 2006
Transition from Amorphous Semiconductor to Amorphous Insulator in Hydrogenated Carbon−Germanium Films Investigated by Raman Spectroscopy Kazimierski, P.; Tyczkowski, J.; Kozanecki, M. Chemistry of Materials, Vol. 14, Issue 11 https://doi.org/10.1021/cm020428s	journal	November 2002
Structural investigation of silica gel films by infrared spectroscopy Almeida, Rui M.; Pantano, Carlo G. Journal of Applied Physics, Vol. 68, Issue 8 https://doi.org/10.1063/1.346213	journal	October 1990
A model for ion-irradiation induced hydrogen loss from organic materials de Jong, M. P.; Maas, A. J. H.; van Ijzendoorn, L. J. Journal of Applied Physics, Vol. 82, Issue 3 https://doi.org/10.1063/1.365871	journal	August 1997
Mid-Infrared Spectroscopy: Anomalies, Artifacts and Common Errors Chalmers, John M. Handbook of Vibrational Spectroscopy https://doi.org/10.1002/0470027320.s3101	other	January 2006

Cited By (1)

Mechanical Response of He-Implanted Amorphous SiOC/Crystalline Fe Nanolaminates Zare, A.; Su, Q.; Gigax, J. Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-41226-w	journal	March 2019

Similar Records

Microstructural evolution of ion-irradiated sol–gel-derived thin films

Journal Article · Mon Jul 17 00:00:00 EDT 2017 · Journal of Materials Science · OSTI ID:1396137

Shojaee, S. A.; Qi, Y.; Wang, Y. Q.; +2 more

Microstructure and Mechanical Properties of Mg{sub 2}Si/AZ91 Composites In Situ Synthesized by Using Silica Fume as the Si Source

Journal Article · Mon Oct 15 00:00:00 EDT 2018 · Journal of Materials Engineering and Performance · OSTI ID:1396137

Zhang, Wenlong; Li, Xianfeng; Ding, Dongyan; +1 more

Effects of water on the mechanical properties of silica glass using molecular dynamics

Journal Article · Tue Jul 30 00:00:00 EDT 2019 · Acta Materialia · OSTI ID:1396137

Mei, Hai; Yang, Yongjian; van Duin, Adri C. T.; +4 more

Related Subjects

36 MATERIALS SCIENCE
glasses
mechanical properties
structure of solids and liquids
surfaces
interfaces and thin films

Title: Ion irradiation induced structural modifications and increase in elastic modulus of silica based thin films

Citation Formats

References (86)

Cited By (1)

Similar Records

Related Subjects