Automatic software correction of residual aberrations in reconstructed HRTEM exit waves of crystalline samples
Abstract We develop an automatic and objective method to measure and correct residual aberrations in atomic-resolution HRTEM complex exit waves for crystalline samples aligned along a low-index zone axis. Our method uses the approximate rotational point symmetry of a column of atoms or single atom to iteratively calculate a best-fit numerical phase plate for this symmetry condition, and does not require information about the sample thickness or precise structure. We apply our method to two experimental focal series reconstructions, imaging a β-Si 3 N 4 wedge with O and N doping, and a single-layer graphene grain boundary. We use peak and lattice fitting to evaluate the precision of the corrected exit waves. We also apply our method to the exit wave of a Si wedge retrieved by off-axis electron holography. In all cases, the software correction of the residual aberration function improves the accuracy of the measured exit waves.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- Grant/Contract Number:
- AC02-05CH11231
- OSTI ID:
- 1333886
- Alternate ID(s):
- OSTI ID: 1379634
- Journal Information:
- Advanced Structural and Chemical Imaging, Journal Name: Advanced Structural and Chemical Imaging Vol. 2 Journal Issue: 1; ISSN 2198-0926
- Publisher:
- Springer Science + Business MediaCopyright Statement
- Country of Publication:
- Germany
- Language:
- English
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