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This content will become publicly available on November 3, 2017

Title: Pattern-generation and pattern-transfer for single-digit nano devices

Authors:
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  1. Department of Micro- and Nanoelectronic Systems (MNES), Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany
  2. Department of Electrical and Electronic Engineering, Imperial College London, South Kensington, London SW7 2AZ, United Kingdom
  3. Nano Analytik GmbH, Ehrenbergstraße 11, 98693 Ilmenau, Germany
  4. Mikrosistemi Ltd., 9010 Varna, Bulgaria
  5. Faculty of Micorsystems Electronics and Photonics, Wrocław University of Science and Technology, Wybrzeze Wyspianskiego 27, Wrocław 50-370, Poland
  6. Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720
Publication Date:
OSTI Identifier:
1332011
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Additional Journal Information:
Journal Volume: 34; Journal Issue: 6; Related Information: CHORUS Timestamp: 2016-11-14 13:01:32; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English