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Title: Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof

Patent ·
OSTI ID:1330348

The present invention includes a high-speed, high-saturation power detector (e.g., a photodiode) compatible with a relatively simple monolithic integration process. In particular embodiments, the photodiode includes an intrinsic bulk absorption region, which is grown above a main waveguide core including a number of quantum wells (QWs) that are used as the active region of a phase modulator. The invention also includes methods of fabricating integrated photodiode and waveguide assemblies using a monolithic, simplified process.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
9,477,040
Application Number:
14/801,257
OSTI ID:
1330348
Resource Relation:
Patent File Date: 2015 Jul 16
Country of Publication:
United States
Language:
English

References (40)

Optical analog-to-digital converter patent July 2009
Optical NAND gate patent August 2011
Optical NOR gate patent September 2011
Optical set-reset latch patent January 2013
Mutually injection locked lasers for enhanced frequency response patent April 2014
Optical domain analog to digital conversion methods and apparatus patent May 2014
Parallel optical sampler patent May 2014
A widely tunable high-speed transmitter using an integrated SGDBR laser-semiconductor optical amplifier and mach-zehnder modulator journal September 2003
Efficient vertical coupling of photodiodes to InGaAsP rib waveguides journal June 1991
Hybrid Silicon Photonics for Optical Interconnects journal March 2011
Quantum-well-intermixed monolithically integrated widely tunable all-optical wavelength converter operating at 10 Gb/s journal August 2005
High-Saturation-Current Charge-Compensated InGaAs–InP Uni-Traveling-Carrier Photodiode journal March 2004
Enhanced photoluminescence emission from bandgap shifted InGaAs/InGaAsP/InP microstructures processed with UV laser quantum well intermixing journal October 2013
Quantum well intermixing journal June 1993
Cross-phase modulation efficiency in offset quantum-well and centered quantum-well semiconductor optical amplifiers journal November 2005
Electroabsorption modulator performance predicted from band-edge absorption spectra of bulk, quantum-well, and quantum-well-intermixed InGaAsP structures journal January 2007
Photocurrent spectroscopy analysis of widely tunable negative-chirp quantum-well intermixed laser-modulator transmitters journal January 2005
Photocurrent spectroscopy for quantum-well intermixed photonic integrated circuit design journal July 2005
40 Gbit/s photonic receivers integrating UTC photodiodes with high- and low-confinement SOAs using quantum well intermixing and MOCVD regrowth journal January 2006
A study of regrowth interface and material quality for a novel InP-based architecture journal December 2004
Demonstration of high saturation power∕high gain SOAs using quantum well intermixing based integration platform journal January 2005
Demonstration of negative chirp characteristics over wide wavelength range using monolithically integrated SG-DBR laser∕electroabsorption modulator journal January 2004
Demonstration of Widely Tunable Single-Chip 10-Gb/s Laser–Modulators Using Multiple-Bandgap InGaAsP Quantum-Well Intermixing journal July 2004
Design and Demonstration of Novel QW Intermixing Scheme for the Integration of UTC-Type Photodiodes With QW-Based Components journal February 2006
Quantum well intermixing and MOCVD regrowth for monolithic integration of 40 Gbit∕s UTC type photodiodes with QW based components journal January 2005
Integration of high-gain and high-saturation-power active regions using quantum-well intermixing and offset-quantum-well regrowth journal January 2004
A quantum-well-intermixing process for wavelength-agile photonic integrated circuits journal July 2002
High contrast InP/InGaAsP grating MOCVD regrowth using TBA and TBP journal December 2004
Integrated Guided-Wave Photodiode Using Through-Absorber Quantum-Well-Intermixing journal September 2013
Monolithically integrated active components: a quantum-well intermixing approach journal March 2005
Multiple-band-edge quantum-well intermixing in the InGaAs∕InGaAsP∕InGaP material system journal June 2005
Optical AND and NOT gates at 40 Gbps using electro-absorption modulator/photodiode Pairs conference November 2010
Postgrowth control of the quantum-well band edge for the monolithic integration of widely tunable lasers and electroabsorption modulators journal September 2003
Tunable buried ridge stripe sampled grating distributed Bragg reflector lasers utilizing quantum well intermixing conference January 2001
Tunable sampled-grating DBR lasers using quantum-well intermixing journal September 2002
Quantum well intermixed waveguide grating journal July 2011
Integration of hybrid silicon lasers and electroabsorption modulators journal January 2008
Mutual Injection Locking of Monolithically Integrated Coupled-Cavity DBR Lasers journal July 2011
Fabrication and molecular beam epitaxy regrowth of first-order, high contrast AlGaAs∕GaAs gratings
  • Wang, C. S.; Morrison, G. B.; Skogen, E. J.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 3 https://doi.org/10.1116/1.2190679
journal January 2006
Towards Monolithic Integration of Nonlinear Optical Frequency Conversion journal September 2010