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Title: Synchrotron X-Ray Topography Analysis of Double Shockley Stacking Faults in 4H-SiC Wafers

Journal Article · · Materials Science Forum (Online)

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Organization:
INDUSTRY
OSTI ID:
1328038
Journal Information:
Materials Science Forum (Online), Vol. 858, Issue 05, 2016; ISSN 1662-9752
Publisher:
Trans Tech Publications
Country of Publication:
United States
Language:
ENGLISH

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