Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems

Tice, Joshua D.; Bassett, Thomas A.; Desai, Amit V.; Apblett, Christopher A.; Kenis, Paul J. A.

Title: Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems

Patent · Tue Sep 20 00:00:00 EDT 2016

OSTI ID:1325770

Tice, Joshua D.; Bassett, Thomas A.; Desai, Amit V.; Apblett, Christopher A.; Kenis, Paul J. A.

An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.

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Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE

Assignee:: The Board of Trustees of the University Of Illinois (Urbana, IL)

Patent Number(s):: 9,447,895

Application Number:: 13/901,200

OSTI ID:: 1325770

Resource Relation:: Patent File Date: 2013 May 23

Country of Publication:: United States

Language:: English

References (73)

Electrostatic valves for microfluidic devices Driggs, B. Scott; Enzelberger, Markus; Quake, Stephen R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7232109 US Patent Document 7,232,109	patent	June 2007
Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes Unger, Marc A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7291512 US Patent Document 7,291,512	patent	November 2007
Passive fluid flow regulator Chappel, Eric https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8539981 US Patent Document 8,539,981	patent	September 2013
Stretchable micro-electrode array [for retinal prosthesis] Maghribi, M.; Hamilton, J.; Polla, D. 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578) https://doi.org/10.1109/MMB.2002.1002269	conference	January 2002
Design considerations for elastomeric normally closed microfluidic valves Mohan, Ritika; Schudel, Benjamin R.; Desai, Amit V. Sensors and Actuators B: Chemical, Vol. 160, Issue 1, p. 1216-1223 https://doi.org/10.1016/j.snb.2011.09.051	journal	December 2011
Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application Yoshida, Kazushi; Tanaka, Shuji; Hagihara, Yosuke Sensors and Actuators A: Physical, Vol. 157, Issue 2, p. 290-298 https://doi.org/10.1016/j.sna.2009.11.030	journal	February 2010
Actuation of elastomeric microvalves in point-of-care settings using handheld, battery-powered instrumentation Addae-Mensah, Kweku A.; Cheung, Yuk Kee; Fekete, Veronika Lab on a Chip, Vol. 10, Issue 12 https://doi.org/10.1039/C002349C	journal	January 2010
Re-configurable fluid circuits by PDMS elastomer micromachining Armani, D.; Liu, C.; Aluru, N. Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) https://doi.org/10.1109/MEMSYS.1999.746817	conference	January 1999
A Bidirectional Electrostatic Microvalve With Microsecond Switching Performance Bae, Byunghoon; Han, Jeahyeong; Masel, Richard I. Journal of Microelectromechanical Systems, Vol. 16, Issue 6 https://doi.org/10.1109/JMEMS.2007.907782	journal	December 2007
A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics Bansal, Tushar; Chang, Meng-Ping; Maharbiz, Michel M. Lab Chip, Vol. 7, Issue 2 https://doi.org/10.1039/B614419E	journal	January 2007
The electro-mechanical response of elastomer membranes coated with ultra-thin metal electrodes Begley, M.; Bartsmith, H.; Scott, O. Journal of the Mechanics and Physics of Solids, Vol. 53, Issue 11 https://doi.org/10.1016/j.jmps.2005.05.002	journal	November 2005
Microfabricated bioprocessor for integrated nanoliter-scale Sanger DNA sequencing Blazej, R. G.; Kumaresan, P.; Mathies, R. A. Proceedings of the National Academy of Sciences, Vol. 103, Issue 19, p. 7240-7245 https://doi.org/10.1073/pnas.0602476103	journal	April 2006
Factors enhancing the reliability of touch-mode electrostatic actuators Cabuz, C.; Cabuz, E. I.; Ohnstein, T. R. Sensors and Actuators A: Physical, Vol. 79, Issue 3, p. 245-250 https://doi.org/10.1016/S0924-4247(99)00281-2	journal	February 2000
Electrostatically-driven elastomer components for user-reconfigurable high density microfluidics Chang, Meng-Ping; Maharbiz, Michel M. Lab on a Chip, Vol. 9, Issue 9 https://doi.org/10.1039/B813244E	journal	January 2009
Droplet-based microfluidics with nonaqueous solvents and solutions Chatterjee, Debalina; Hetayothin, Boonta; Wheeler, Aaron R. Lab on a Chip, Vol. 6, Issue 2 https://doi.org/10.1039/B515566E	journal	January 2006
Two-layer multiplexed peristaltic pumps for high-density integrated microfluidics Cole, Matthew C.; Desai, Amit V.; Kenis, Paul J. A. Sensors and Actuators B: Chemical, Vol. 151, Issue 2, p. 384-393 https://doi.org/10.1016/j.snb.2010.07.012	journal	January 2011
Small but strong: A review of the mechanical properties of carbon nanotube–polymer composites Coleman, Jonathan N.; Khan, Umar; Blau, Werner J. Carbon, Vol. 44, Issue 9, p. 1624-1652 https://doi.org/10.1016/j.carbon.2006.02.038	journal	August 2006
Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach Darling, Robert B.; Hivick, Chris; Xu, Jianyang Sensors and Actuators A: Physical, Vol. 70, Issue 1-2, p. 32-41 https://doi.org/10.1016/S0924-4247(98)00109-5	journal	October 1998
Accurate method for determining adhesion of cantilever beams de Boer, M. P.; Michalske, T. A. Journal of Applied Physics, Vol. 86, Issue 2 https://doi.org/10.1063/1.370809	journal	July 1999
Design considerations for electrostatic microvalves with applications in poly(dimethylsiloxane)-based microfluidics Desai, Amit V.; Tice, Joshua D.; Apblett, Christopher A. Lab on a Chip, Vol. 12, Issue 6 https://doi.org/10.1039/C2LC21133E	journal	January 2012
Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS Flores, G.; Mercado, G.; Pelesko, J. A. SIAM Journal on Applied Mathematics, Vol. 67, Issue 2 https://doi.org/10.1137/060648866	journal	January 2007
Handheld recirculation system and customized media for microfluidic cell culture Futai, Nobuyuki; Gu, Wei; Song, Jonathan W. Lab Chip, Vol. 6, Issue 1 https://doi.org/10.1039/B510901A	journal	January 2006
Gold Nanoparticles Obtained by Bio-precipitation from Gold(III) Solutions Gardea-Torresdey, J. L.; Tiemann, K. J.; Gamez, G. Journal of Nanoparticle Research, Vol. 1, Issue 3, p. 397-404 https://doi.org/10.1023/A:1010008915465	journal	January 1999
Computerized microfluidic cell culture using elastomeric channels and Braille displays Gu, W.; Zhu, X.; Futai, N. Proceedings of the National Academy of Sciences, Vol. 101, Issue 45, p. 15861-15866 https://doi.org/10.1073/pnas.0404353101	journal	October 2004
Multiplexed hydraulic valve actuation using ionic liquid filled soft channels and Braille displays Gu, Wei; Chen, Hao; Tung, Yi-Chung Applied Physics Letters, Vol. 90, Issue 3 https://doi.org/10.1063/1.2431771	journal	January 2007
Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties Guo, Yujin; Pan, Zhenguo; Ward, M. J. SIAM Journal on Applied Mathematics, Vol. 66, Issue 1 https://doi.org/10.1137/040613391	journal	January 2005
Collapse of stamps for soft lithography due to interfacial adhesion Hsia, K. J.; Huang, Y.; Menard, E. Applied Physics Letters, Vol. 86, Issue 15, Article No. 154106 https://doi.org/10.1063/1.1900303	journal	April 2005
Characterizations and optimization of electrical contact between nanocomposite elastomer and metal Hu, Huan; Liu, Chang TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference https://doi.org/10.1109/SENSOR.2009.5285922	conference	June 2009
Effects of Injection Schemes and Column Geometry on the Performance of Microchip Electrophoresis Devices Jacobson, Stephen C.; Hergenroder, Roland.; Koutny, Lance B. Analytical Chemistry, Vol. 66, Issue 7 https://doi.org/10.1021/ac00079a028	journal	April 1994
Microreaction engineering — is small better? Jensen, Klavs F. Chemical Engineering Science, Vol. 56, Issue 2, p. 293-303 https://doi.org/10.1016/S0009-2509(00)00230-X	journal	January 2001
Acoustically driven programmable liquid motion using resonance cavities Langelier, S. M.; Chang, D. S.; Zeitoun, R. I. Proceedings of the National Academy of Sciences, Vol. 106, Issue 31, p. 12617-12622 https://doi.org/10.1073/pnas.0900043106	journal	July 2009
Multistep Synthesis of a Radiolabeled Imaging Probe Using Integrated Microfluidics Lee, C. -C. Science, Vol. 310, Issue 5755 https://doi.org/10.1126/science.1118919	journal	December 2005
High-radix microfluidic multiplexer with pressure valves of different thresholds Lee, Dong Woo; Cho, Young-Ho Lab on a Chip, Vol. 9, Issue 12 https://doi.org/10.1039/B820582E	journal	January 2009
Frequency-specific flow control in microfluidic circuits with passive elastomeric features Leslie, Daniel C.; Easley, Christopher J.; Seker, Erkin Nature Physics, Vol. 5, Issue 3 https://doi.org/10.1038/nphys1196	journal	February 2009
Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-micro-electromechanical systems-related applications Liu, Miao Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 2 https://doi.org/10.1117/1.2731381	journal	April 2007
Critical Review: Adhesion in surface micromechanical structures Maboudian, Roya Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 1 https://doi.org/10.1116/1.589247	journal	January 1997
A Systems Approach to Measuring the Binding Energy Landscapes of Transcription Factors Maerkl, S. J.; Quake, S. R. Science, Vol. 315, Issue 5809 https://doi.org/10.1126/science.1131007	journal	January 2007
Dissecting biological "dark matter" with single-cell genetic analysis of rare and uncultivated TM7 microbes from the human mouth Marcy, Y.; Ouverney, C.; Bik, E. M. Proceedings of the National Academy of Sciences, Vol. 104, Issue 29, p. 11889-11894 https://doi.org/10.1073/pnas.0704662104	journal	July 2007
Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory Mastrangelo, C. H.; Hsu, C. H. Journal of Microelectromechanical Systems, Vol. 2, Issue 1 https://doi.org/10.1109/84.232593	journal	March 1993
Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments Mastrangelo, C. H.; Hsu, C. H. Journal of Microelectromechanical Systems, Vol. 2, Issue 1 https://doi.org/10.1109/84.232594	journal	March 1993
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films Meitl, Matthew A.; Zhou, Yangxin; Gaur, Anshu Nano Letters, Vol. 4, Issue 9, p. 1643-1647 https://doi.org/10.1021/nl0491935	journal	September 2004
Integrated elastomeric components for autonomous regulation of sequential and oscillatory flow switching in microfluidic devices Mosadegh, Bobak; Kuo, Chuan-Hsien; Tung, Yi-Chung Nature Physics, Vol. 6, Issue 6 https://doi.org/10.1038/nphys1637	journal	April 2010
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures Osterberg, P. M.; Senturia, S. D. Journal of Microelectromechanical Systems, Vol. 6, Issue 2 https://doi.org/10.1109/84.585788	journal	June 1997
An integrated microfluidic device for influenza and other genetic analyses Pal, R.; Yang, M.; Lin, R. Lab on a Chip, Vol. 5, Issue 10 https://doi.org/10.1039/B505994A	journal	January 2005
Adhesion characteristics of MEMS in microfluidic environments Parker, E. E.; Ashurst, W. R.; Carraro, C. Journal of Microelectromechanical Systems, Vol. 14, Issue 5 https://doi.org/10.1109/JMEMS.2005.851867	journal	October 2005
Wet-etching of structures with straight facets and adjustable taper into glass substrates Pekas, Nikola; Zhang, Qing; Nannini, Matthieu Lab Chip, Vol. 10, Issue 4 https://doi.org/10.1039/B912770D	journal	January 2010
Microfluidic Generation of Lipidic Mesophases for Membrane Protein Crystallization Perry, Sarah L.; Roberts, Griffin W.; Tice, Joshua D. Crystal Growth & Design, Vol. 9, Issue 6 https://doi.org/10.1021/cg900289d	journal	June 2009
Surface modification in microsystems and nanosystems Prakash, Shaurya; Karacor, M. B.; Banerjee, S. Surface Science Reports, Vol. 64, Issue 7 https://doi.org/10.1016/j.surfrep.2009.05.001	journal	July 2009
Microfluidic system for on-chip high-throughput whole-animal sorting and screening at subcellular resolution Rohde, C. B.; Zeng, F.; Gonzalez-Rubio, R. Proceedings of the National Academy of Sciences, Vol. 104, Issue 35, p. 13891-13895 https://doi.org/10.1073/pnas.0706513104	journal	August 2007
Ultra-low electrical percolation threshold in carbon-nanotube-epoxy composites Sandler, J. K. W.; Kirk, J. E.; Kinloch, I. A. Polymer, Vol. 44, Issue 19, p. 5893-5899 https://doi.org/10.1016/S0032-3861(03)00539-1	journal	September 2003
Multiplexed detection of nucleic acids in a combinatorial screening chip Schudel, Benjamin R.; Tanyeri, Melikhan; Mukherjee, Arnab Lab on a Chip, Vol. 11, Issue 11 https://doi.org/10.1039/C0LC00342E	journal	January 2011
Effect of Stamp Deformation on the Quality of Microcontact Printing: Theory and Experiment Sharp, Kenneth G.; Blackman, Gregory S.; Glassmaker, Nicholas J. Langmuir, Vol. 20, Issue 15 https://doi.org/10.1021/la036332+	journal	June 2004
Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films Small, Martha K.; Nix, W. D. Journal of Materials Research, Vol. 7, Issue 6 https://doi.org/10.1557/JMR.1992.1553	journal	June 1992
High Throughput Gene Expression Measurement with Real Time PCR in a Microfluidic Dynamic Array Spurgeon, Sandra L.; Jones, Robert C.; Ramakrishnan, Ramesh PLoS ONE, Vol. 3, Issue 2 https://doi.org/10.1371/journal.pone.0001662	journal	February 2008
Chaotic Mixer for Microchannels Stroock, A. D. Science, Vol. 295, Issue 5555 https://doi.org/10.1126/science.1066238	journal	January 2002
Scaling properties of a low-actuation pressure microfluidic valve Studer, Vincent; Hang, Giao; Pandolfi, Anna Journal of Applied Physics, Vol. 95, Issue 1 https://doi.org/10.1063/1.1629781	journal	January 2004
An ultra-thin PDMS membrane as a bio/micro–nano interface: fabrication and characterization Thangawng, Abel L.; Ruoff, Rodney S.; Swartz, Melody A. Biomedical Microdevices, Vol. 9, Issue 4 https://doi.org/10.1007/s10544-007-9070-6	journal	May 2007
Microfluidic Large-Scale Integration Thorsen, T. Science, Vol. 298, Issue 5593 https://doi.org/10.1126/science.1076996	journal	September 2002
A microfluidic platform for pharmaceutical salt screening Thorson, Michael R.; Goyal, Sachit; Schudel, Benjamin R. Lab on a Chip, Vol. 11, Issue 22 https://doi.org/10.1039/C1LC20645A	journal	January 2011
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography Unger, M. A. Science, Vol. 288, Issue 5463 https://doi.org/10.1126/science.288.5463.113	journal	April 2000
Digital microfluidics using soft lithography Urbanski, John Paul; Thies, William; Rhodes, Christopher Lab Chip, Vol. 6, Issue 1 https://doi.org/10.1039/B510127A	journal	January 2006
A high-stroke, high-pressure electrostatic actuator for valve applications van der Wijngaart, Wouter; Ask, Håkan; Enoksson, Peter Sensors and Actuators A: Physical, Vol. 100, Issue 2-3, p. 264-271 https://doi.org/10.1016/S0924-4247(02)00070-5	journal	September 2002
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films Vlassak, J. J.; Nix, W. D. Journal of Materials Research, Vol. 7, Issue 12 https://doi.org/10.1557/JMR.1992.3242	journal	December 1992
Deflection and stability of membrane structures under electrostatic and Casimir forces in microelectromechanical systems Wang, C.; Guo, W.; Feng, Q. Acta Mechanica, Vol. 180, Issue 1-4 https://doi.org/10.1007/s00707-005-0265-8	journal	September 2005
Static control logic for microfluidic devices using pressure-gain valves Weaver, James A.; Melin, Jessica; Stark, Don Nature Physics, Vol. 6, Issue 3 https://doi.org/10.1038/nphys1513	journal	January 2010
Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) Wibbeler, Jürgen; Pfeifer, Günter; Hietschold, Michael Sensors and Actuators A: Physical, Vol. 71, Issue 1-2, p. 74-80 https://doi.org/10.1016/S0924-4247(98)00155-1	journal	November 1998
Transparent, Conductive Carbon Nanotube Films Wu, Zhuangchun; Chen, Zhihong; Du, Xu Science, Vol. 305, Issue 5688, p. 1273-1276 https://doi.org/10.1126/science.1101243	journal	August 2004
Surface micromachined electrostatically actuated micro peristaltic pump Xie, Jun; Shih, Jason; Lin, Qiao Lab on a Chip, Vol. 4, Issue 5 https://doi.org/10.1039/B403906H	journal	January 2004
Effect of Surface Free Energy on PDMS Transfer in Microcontact Printing and Its Application to ToF-SIMS to Probe Surface Energies Yang, Li; Shirahata, Naoto; Saini, Gaurav Langmuir, Vol. 25, Issue 10 https://doi.org/10.1021/la804272n	journal	May 2009
Dielectric charging effects on Parylene electrostatic actuators Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) https://doi.org/10.1109/MEMSYS.2002.984346	conference	January 2002
Stiction and anti-stiction in MEMS and NEMS Yapu, Zhao Acta Mechanica Sinica, Vol. 19, Issue 1 https://doi.org/10.1007/BF02487448	journal	February 2003
Deformation of PDMS membrane and microcantilever by a water droplet: Comparison between Mooney–Rivlin and linear elastic constitutive models Yu, Ying-Song; Zhao, Ya-Pu Journal of Colloid and Interface Science, Vol. 332, Issue 2, p. 467-476 https://doi.org/10.1016/j.jcis.2008.12.054	journal	April 2009
A method of printing carbon nanotube thin films Zhou, Yangxin; Hu, Liangbing; Grüner, George Applied Physics Letters, Vol. 88, Issue 12 https://doi.org/10.1063/1.2187945	journal	March 2006

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