Effects associated with nanostructure fabrication using in situ liquid cell TEM technology

Chen, Xin; Zhou, Lihui; Wang, Ping; Cao, Hongliang; Miao, Xiaoli; Wei, Feifei; Chen, Xia

doi:10.1007/s40820-015-0054-4

Title: Effects associated with nanostructure fabrication using in situ liquid cell TEM technology

Journal Article · Tue Jul 28 00:00:00 EDT 2015 · Nano-Micro Letters

DOI:https://doi.org/10.1007/s40820-015-0054-4· OSTI ID:1324961

Chen, Xin ^[1]; Zhou, Lihui ^[2]; Wang, Ping ^[2]; Cao, Hongliang ^[2]; Miao, Xiaoli ^[2]; Wei, Feifei ^[2]; Chen, Xia ^[2]

East China Univ. of Science and Technology, Shanghai (People's Republic of China); Chinese Academy of Science, Shanghai (People's Republic of China)
East China Univ. of Science and Technology, Shanghai (People's Republic of China)

We studied silicon, carbon, and SiC_x nanostructures fabricated using liquid-phase electron-beam-induced deposition technology in transmission electron microscopy systems. Nanodots obtained from fixed electron beam irradiation followed a universal size versus beam dose trend, with precursor concentrations from pure SiCl₄ to 0 % SiCl₄ in CH₂Cl₂, and electron beamintensity ranges of two orders of magnitude, showing good controllability of the deposition. Secondary electrons contributed to the determination of the lateral sizes of the nanostructures, while the primary beam appeared to have an effect in reducing the vertical growth rate. These results can be used to generate donut-shaped nanostructures. Using a scanning electron beam, line structures with both branched and unbranched morphologies were also obtained. As a result, the liquid-phase electron-beam induced deposition technology is shown to be an effective tool for advanced nanostructured material generation.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Univ. of Illinois, Chicago, IL (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: FG02-07ER46453; FG02-07ER46471

OSTI ID:: 1324961

Journal Information:: Nano-Micro Letters, Vol. 7, Issue 4; ISSN 2311-6706

Publisher:: SpringerCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 2 works

Citation information provided by
Web of Science

References (27)

Focused, Nanoscale Electron-Beam-Induced Deposition and Etching Randolph, S. J.; Fowlkes, J. D.; Rack, P. D. Critical Reviews in Solid State and Materials Sciences, Vol. 31, Issue 3 https://doi.org/10.1080/10408430600930438	journal	September 2006
Electron microscopy of specimens in liquid de Jonge, Niels; Ross, Frances M. Nature Nanotechnology, Vol. 6, Issue 11, p. 695-704 https://doi.org/10.1038/nnano.2011.161	journal	October 2011
Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition Cicoira, F.; Hoffmann, P.; Olsson, C. O. A. Applied Surface Science, Vol. 242, Issue 1-2 https://doi.org/10.1016/j.apsusc.2004.08.005	journal	March 2005
A Study of Electron Beam Induced Deposition and Nano Device Fabrication Using Liquid Cell TEM Technology Chen, Xin; Zhou, Lihui; Wang, Ping Chinese Journal of Chemistry, Vol. 32, Issue 5 https://doi.org/10.1002/cjoc.201400139	journal	May 2014
Gas-assisted focused electron beam and ion beam processing and fabrication Utke, Ivo; Hoffmann, Patrik; Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 4 https://doi.org/10.1116/1.2955728	journal	January 2008
Recent developments of the in situ wet cell technology for transmission electron microscopies Chen, Xin; Li, Chang; Cao, Hongling Nanoscale, Vol. 7, Issue 11 https://doi.org/10.1039/C4NR07209J	journal	January 2015
Nanometer-resolution electron microscopy through micrometers-thick water layers de Jonge, Niels; Poirier-Demers, Nicolas; Demers, Hendrix Ultramicroscopy, Vol. 110, Issue 9 https://doi.org/10.1016/j.ultramic.2010.04.001	journal	August 2010
Electron-Beam-Induced Deposition of Platinum from a Liquid Precursor Donev, Eugenii U.; Hastings, J. Todd Nano Letters, Vol. 9, Issue 7 https://doi.org/10.1021/nl9012216	journal	July 2009
Electron beam induced deposition of silicon nanostructures from a liquid phase precursor Liu, Yin; Chen, Xin; Noh, Kyong Wook Nanotechnology, Vol. 23, Issue 38 https://doi.org/10.1088/0957-4484/23/38/385302	journal	September 2012
Bubble and Pattern Formation in Liquid Induced by an Electron Beam Grogan, Joseph M.; Schneider, Nicholas M.; Ross, Frances M. Nano Letters, Vol. 14, Issue 1 https://doi.org/10.1021/nl404169a	journal	December 2013
Controlled Growth of Nanoparticles from Solution with In Situ Liquid Transmission Electron Microscopy Evans, James E.; Jungjohann, Katherine L.; Browning, Nigel D. Nano Letters, Vol. 11, Issue 7 https://doi.org/10.1021/nl201166k	journal	July 2011
Front cover Chemical Communications, Vol. 50, Issue 67, p. 9419 https://doi.org/10.1039/C4CC90290D	journal	July 2014
Observation of Single Colloidal Platinum Nanocrystal Growth Trajectories Zheng, H.; Smith, R. K.; Jun, Y. -w. Science, Vol. 324, Issue 5932 https://doi.org/10.1126/science.1172104	journal	June 2009
Electron beam deposition for nanofabrication: Insights from surface science Wnuk, J. D.; Rosenberg, S. G.; Gorham, J. M. Surface Science, Vol. 605, Issue 3-4 https://doi.org/10.1016/j.susc.2010.10.035	journal	February 2011
Electron beam induced deposition of rhodium from the precursor [RhCl(PF3)2]2: morphology, structure and chemical composition Cicoira, F.; Leifer, K.; Hoffmann, P. Journal of Crystal Growth, Vol. 265, Issue 3-4 https://doi.org/10.1016/j.jcrysgro.2004.02.006	journal	May 2004
Growth characterization of electron-beam-induced silver deposition from liquid precursor Ocola, Leonidas E.; Joshi-Imre, Alexandra; Kessel, Cynthia Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6 https://doi.org/10.1116/1.4765629	journal	November 2012
Liquid-precursor electron-beam-induced deposition of Pt nanostructures: dose, proximity, resolution Donev, E. U.; Hastings, J. T. Nanotechnology, Vol. 20, Issue 50 https://doi.org/10.1088/0957-4484/20/50/505302	journal	November 2009
A critical literature review of focused electron beam induced deposition van Dorp, W. F.; Hagen, C. W. Journal of Applied Physics, Vol. 104, Issue 8 https://doi.org/10.1063/1.2977587	journal	October 2008
Direct in Situ Determination of the Mechanisms Controlling Nanoparticle Nucleation and Growth Woehl, Taylor J.; Evans, James E.; Arslan, Ilke ACS Nano, Vol. 6, Issue 10 https://doi.org/10.1021/nn303371y	journal	September 2012
Observation of growth of metal nanoparticles Liao, Hong-Gang; Niu, Kaiyang; Zheng, Haimei Chemical Communications, Vol. 49, Issue 100 https://doi.org/10.1039/c3cc47473a	journal	January 2013
Factors influencing quantitative liquid (scanning) transmission electron microscopy Abellan, P.; Woehl, T. J.; Parent, L. R. Chem. Commun., Vol. 50, Issue 38 https://doi.org/10.1039/C3CC48479C	journal	January 2014
In Situ Studies of Chemistry and Structure of Materials in Reactive Environments Tao, F.; Salmeron, M. Science, Vol. 331, Issue 6014 https://doi.org/10.1126/science.1197461	journal	January 2011
Electron–Water Interactions and Implications for Liquid Cell Electron Microscopy Schneider, Nicholas M.; Norton, Michael M.; Mendel, Brian J. The Journal of Physical Chemistry C, Vol. 118, Issue 38 https://doi.org/10.1021/jp507400n	journal	September 2014
In situ electrochemical wet cell transmission electron microscopy characterization of solid–liquid interactions between Ni and aqueous NiCl2 Chen, X.; Noh, K. W.; Wen, J. G. Acta Materialia, Vol. 60, Issue 1 https://doi.org/10.1016/j.actamat.2011.09.047	journal	January 2012
Dynamic microscopy of nanoscale cluster growth at the solid–liquid interface Williamson, M. J.; Tromp, R. M.; Vereecken, P. M. Nature Materials, Vol. 2, Issue 8 https://doi.org/10.1038/nmat944	journal	July 2003
Challenges associated with in-situ TEM in environmental systems: The case of silver in aqueous solutions Noh, Kyong Wook; Liu, Yin; Sun, Li Ultramicroscopy, Vol. 116 https://doi.org/10.1016/j.ultramic.2012.03.012	journal	May 2012
Insulating Films Formed Under Electron and Ion Bombardment Stewart, R. Lariviere Physical Review, Vol. 45, Issue 7 https://doi.org/10.1103/physrev.45.488	journal	April 1934

Cited By (1)

Investigating materials formation with liquid-phase and cryogenic TEM De Yoreo, J. J.; N. A. J. M., Sommerdijk Nature Reviews Materials, Vol. 1, Issue 8 https://doi.org/10.1038/natrevmats.2016.35	journal	June 2016

Similar Records

MBE fabrication of self-assembled Si and metal nanostructures on Si surfaces

Journal Article · Sun Jan 01 00:00:00 EST 2006 · Surface Science · OSTI ID:1324961

Galiana, Natalia; Martin, Pedro-Pablo; Munuera, Carmen; +5 more

MAGNETIC INDUCTION MAPPING IN TEM OF MICRO AND NANO PATTERNED CO/NI ARRAYS.

Conference · Sun Aug 04 00:00:00 EDT 2002 · OSTI ID:1324961

VOLKOV, V V; ZHU, Y; MALAC, M; +2 more

In situ wet-cell TEM observation of gold nanoparticle motion in an aqueous solution

Journal Article · Mon Oct 29 00:00:00 EDT 2012 · Nanoscale Research Letters (Online) · OSTI ID:1324961

Chen, Xin; Wen, Jianguo

Related Subjects

36 MATERIALS SCIENCE
electron-beam-induced deposition
in situ TEM
nanostrucutre
semiconductor
nanolithography

Title: Effects associated with nanostructure fabrication using in situ liquid cell TEM technology

Citation Formats

References (27)

Cited By (1)

Similar Records

Related Subjects