Dependence on excitation symmetry of electrical parameters and radial currents in a parallel-plate RF discharge
- Sandia National Lab., Albuquerque, NM (United States); and others
Current probes were installed inside a GEC RF Reference Cell (10-cm-diam electrodes, 2.5-cm spacing, 13.56 MHz) in order to measure currents to the chamber walls and to the ground shields. An air-core transformer was used to achieve equal-amplitude opposite-phase excitation of the top and bottom electrodes. In 100-mTorr argon discharges with both electrodes powered, most of the current flowed between the two electrodes. With only one electrode powered, the largest current flow was from the powered electrode to the chamber wall. In both cases, other currents were significant and dc bias referred to the chamber walls was high. In both cases, the electrode voltage had little harmonic content but current waveforms were rich in harmonics. The authors will compare voltages, currents, and electron densities vs. drive symmetry.
- OSTI ID:
- 131216
- Report Number(s):
- CONF-920376-; ISSN 0003-0503; TRN: 95:007049-0215
- Journal Information:
- Bulletin of the American Physical Society, Vol. 37, Issue 9; Conference: Meeting of the American Physical Society, Indianapolis, IN (United States), 16-20 Mar 1992; Other Information: PBD: Dec 1992
- Country of Publication:
- United States
- Language:
- English
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