A bounded two dimensional PIC-MCC code for simulating processing plasmas

Journal Article · Tue Dec 01 00:00:00 EST 1992 · Bulletin of the American Physical Society

OSTI ID:127971

Vahedi, V; Birdsall, C K; Lieberman, M A ^[1]

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1. Univ. of California, Berkeley, CA (United States); and others

The authors have developed a bounded two dimensional particle-in-cell simulation code with a Monte Carlo Collision (MCC) handler to study processing discharges. The MCC package models the collisions, between charged and neutral particles, which are needed to obtain a self sustained plasma and the proper electron and ion energy loss mechanisms. The simulations are aimed at determining uniformity of particle fluxes (magnitude and angle) across a typical target. Some early results are obtained from an x-y model with electrode area ratio of 6:1; a similar r-z model is in progress which can be used to study cylindrical chambers.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 127971
• Report Number(s): CONF-920376-; ISSN 0003-0503; CNN: Grant ECS-8910827; TRN: 95:007049-0250
• Journal Information: Bulletin of the American Physical Society, Vol. 37, Issue 9; Conference: Meeting of the American Physical Society, Indianapolis, IN (United States), 16-20 Mar 1992; Other Information: PBD: Dec 1992
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
HIGH-FREQUENCY DISCHARGES
COMPUTERIZED SIMULATION
MONTE CARLO METHOD
TWO-DIMENSIONAL CALCULATIONS
PLASMA
ION-ATOM COLLISIONS
ION-MOLECULE COLLISIONS