A Novel Backside Gate Structure to Improve Device Performance
Conference
·
OSTI ID:1265750
- University of Florida
- University of Florida, Gainesville
- ORNL
- Arizona State University
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 1265750
- Resource Relation:
- Conference: 227th ECS Meeting, Chicago, IL, USA, 20150524, 20150528
- Country of Publication:
- United States
- Language:
- English
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