Method to fabricate functionalized conical nanopores

Small, Leo J.; Spoerke, Erik David; Wheeler, David R.

Title: Method to fabricate functionalized conical nanopores

Patent · Tue Jul 12 00:00:00 EDT 2016

OSTI ID:1261635

Small, Leo J.; Spoerke, Erik David; Wheeler, David R.

A pressure-based chemical etch method is used to shape polymer nanopores into cones. By varying the pressure, the pore tip diameter can be controlled, while the pore base diameter is largely unaffected. The method provides an easy, low-cost approach for conically etching high density nanopores.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 9,387,444

Application Number:: 14/543,298

OSTI ID:: 1261635

Resource Relation:: Patent File Date: 2014 Nov 17

Country of Publication:: United States

Language:: English

References (20)

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