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Title: Atomic layer epitaxy of hematite on indium tin oxide for application in solar energy conversion

Patent ·
OSTI ID:1261619

A method to provide an article of manufacture of iron oxide on indium tin oxide for solar energy conversion. An atomic layer epitaxy method is used to deposit an uncommon bixbytite-phase iron (III) oxide (.beta.-Fe.sub.2O.sub.3) which is deposited at low temperatures to provide 99% phase pure .beta.-Fe.sub.2O.sub.3 thin films on indium tin oxide. Subsequent annealing produces pure .alpha.-Fe.sub.2O.sub.3 with well-defined epitaxy via a topotactic transition. These highly crystalline films in the ultra thin film limit enable high efficiency photoelectrochemical chemical water splitting.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
9,388,499
Application Number:
14/288,998
OSTI ID:
1261619
Resource Relation:
Patent File Date: 2014 May 28
Country of Publication:
United States
Language:
English

References (3)

Substrate Dependent Water Splitting with Ultrathin α-Fe 2 O 3 Electrodes journal May 2014
Atomic Layer Deposition of Fe2O3 Using Ferrocene and Ozone
  • Martinson, Alex B. F.; DeVries, Michael J.; Libera, Joseph A.
  • The Journal of Physical Chemistry C, Vol. 115, Issue 10, p. 4333-4339 https://doi.org/10.1021/jp110203x
journal February 2011
Low-resistance ITO thin film and method for manufacturing such a film patent November 2004

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