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Title: Interface Trap Density Reduction for Al 2 O 3 /GaN (0001) Interfaces by Oxidizing Surface Preparation prior to Atomic Layer Deposition

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Publication Date:
OSTI Identifier:
DOE Contract Number:
N0012-10-1-0937; 2393.001; DEAC02-05CH11231; AC02-76SF0051
Resource Type:
Journal Article
Resource Relation:
Journal Name: ACS Applied Materials and Interfaces; Journal Volume: 7; Journal Issue: 23
Research Org:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States