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Title: Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers

We report that AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.
 [1] ;  [2] ;  [3] ;  [2] ;  [4]
  1. Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Physics and Applications Division
  2. Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Science and Technology Division
  3. Univ. of Nebraska, Lincoln, NE (United States)
  4. Univ. of Michigan, Ann Arbor, MI (United States)
Publication Date:
OSTI Identifier:
Accepted Manuscript
Journal Name:
Scientific Reports
Additional Journal Information:
Journal Volume: 5; Journal ID: ISSN 2045-2322
Nature Publishing Group
Research Org:
Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
36 MATERIALS SCIENCE structural properties; synthesis and processing