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Title: Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.4950737· OSTI ID:1254334
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Slope measuring deflectometry is commonly used by the X-ray optics community to measure the long-spatial-wavelength surface figure error of optical components dedicated to guide and focus X-rays under grazing incidence condition at synchrotron and free electron laser beamlines. The best performing instruments of this kind are capable of absolute accuracy on the level of 30-50 nrad. However, the exact bandwidth of the measurements, determined at the higher spatial frequencies by the instrument's spatial resolution, or more generally by the instrument's modulation transfer function (MTF) is hard to determine. An MTF calibration method based on application of a test surface with a one-dimensional (1D) chirped height profile of constant amplitude was suggested in the past. In this work, we propose a new approach to designing the test surfaces with a 2D-chirped topography, specially optimized for MTF characterization of slope measuring instruments. The design of the developed MTF test samples based on the proposed linear chirped slope profiles (LCSPs) is free of the major drawback of the 1D chirped height profiles, where in the slope domain, the amplitude strongly increases with the local spatial frequency of the profile. We provide the details of fabrication of the LCSP samples. The results of first application of the developed test samples to measure the spatial resolution of the BESSY-NOM at different experimental arrangements are also presented and discussed.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1254334
Alternate ID(s):
OSTI ID: 1420627; OSTI ID: 1530234
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Vol. 87 Journal Issue: 5; ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 25 works
Citation information provided by
Web of Science

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Cited By (7)

Optimization of the size and shape of the scanning aperture in autocollimator-based deflectometric profilometers journal February 2019
On the characterization of a 1 m long, ultra-precise KB-focusing mirror pair for European XFEL by means of slope measuring deflectometry journal February 2019
Modeling surface topography of state-of-the-art x-ray mirrors as a result of stochastic polishing process: recent developments conference September 2016
Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics conference September 2017
The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors conference November 2018
Next generation of a linear chirped slope profile fabricated by plasma jet machining conference July 2019
Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors conference October 2019

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