Femtosecond laser induced breakdown spectroscopy of Cu at the micron/sub-micron scale

Zorba, Vassilia; Mao, Xianglei; Russo, Richard E.

doi:10.1016/j.sab.2015.08.011

Title: Femtosecond laser induced breakdown spectroscopy of Cu at the micron/sub-micron scale

Journal Article · Mon Aug 31 00:00:00 EDT 2015 · Spectrochimica Acta. Part B, Atomic Spectroscopy

DOI:https://doi.org/10.1016/j.sab.2015.08.011· OSTI ID:1532169

Zorba, Vassilia ^[1]; Mao, Xianglei ^[1]; Russo, Richard E. ^[2]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Applied Spectra, Fremont, CA (United States)

While femtosecond Laser Induced Breakdown Spectroscopy has been studied in the macro-scale (i.e. ablation crater sizes of tens to hundreds of micrometers), the spectral emission mechanisms at the micron/sub-micron scale remain largely unknown, mainly because of the challenges associated with spectral emission acquisition from the limited amounts of ablated mass at these small lengthscales. In this work we study the limits of detection, the laser-induced plasma properties and spectral emission efficiency of Cu at the micron/submicron scale. Although the corresponding number electron densities and temperatures are similar to those reported for macroscale laser ablation, our findings suggest less efficient luminous spectral emission per ablated volume as we scale down in laser energy and crater sizes. Furthermore, these results provide a first insight into fs laser-induced plasma properties at the micron/sub-micron scale regime.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1532169

Alternate ID(s):: OSTI ID: 1251852

Journal Information:: Spectrochimica Acta. Part B, Atomic Spectroscopy, Vol. 113, Issue C; ISSN 0584-8547

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 38 works

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Review—Laser Ablation Ionization Mass Spectrometry (LIMS) for Analysis of Electrodeposited Cu Interconnects Grimaudo, Valentine; Moreno-García, Pavel; Riedo, Andreas Journal of The Electrochemical Society, Vol. 166, Issue 1 https://doi.org/10.1149/2.0221901jes	journal	December 2018
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Title: Femtosecond laser induced breakdown spectroscopy of Cu at the micron/sub-micron scale

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