A one-dimensional ion beam figuring system for x-ray mirror fabrication

Journal Article · Fri Oct 30 00:00:00 EDT 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4934806· OSTI ID:1247685

Idir, Mourad ^[1]; Huang, Lei ^[1]; Bouet, Nathalie ^[1]; Kaznatcheev, Konstantine ^[1]; Vescovi, Matthew ^[1]; Lauer, Ken ^[1]; Conley, Ray ^[2]; Rennie, Kent ^[3]; Kahn, Jim ^[3]; Nethery, Richard ^[3]; Zhou, Lin ^[4]

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1. Brookhaven National Lab. (BNL), Upton, NY (United States)
2. Argonne National Lab. (ANL), Argonne, IL (United States)
3. Kaufman & Robinson, Inc., Fort Collins, CO (United States)
4. National Univ. of Defense Technology, Hunan (China); Hu’nan Key Laboratory of Ultra-precision Machining Technology, Hunan (China)

We report on the development of a one-dimensional Ion Beam Figuring (IBF) system for x-ray mirror polishing. Ion beam figuring provides a highly deterministic method for the final precision figuring of optical components with advantages over conventional methods. The system is based on a state of the art sputtering deposition system outfitted with a gridded radio frequency inductive coupled plasma ion beam source equipped with ion optics and dedicated slit developed specifically for this application. Here, the production of an IBF system able to produce an elongated removal function rather than circular is presented in this paper, where we describe in detail the technical aspect and present the first obtained results.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• Grant/Contract Number: AC02-06CH11357; SC0012704; NCET-13-0165
• OSTI ID: 1247685
• Alternate ID(s): OSTI ID: 1421270
• Journal Information: Review of Scientific Instruments, Vol. 86, Issue 10; ISSN 0034-6748
• Publisher: American Institute of Physics (AIP)
• Country of Publication: United States
• Language: English

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