Piezoelectric MEMS Based on Aluminum Nitride.
Abstract
Abstract not provided.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1244916
- Report Number(s):
- SAND2015-0266C
562157
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Conference: Proposed for presentation at the Electronic Materials and Applications 2015 held January 21-23, 2015 in Orlando, Florida, United States.
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Griffin, Benjamin. Piezoelectric MEMS Based on Aluminum Nitride.. United States: N. p., 2015.
Web.
Griffin, Benjamin. Piezoelectric MEMS Based on Aluminum Nitride.. United States.
Griffin, Benjamin. 2015.
"Piezoelectric MEMS Based on Aluminum Nitride.". United States. https://www.osti.gov/servlets/purl/1244916.
@article{osti_1244916,
title = {Piezoelectric MEMS Based on Aluminum Nitride.},
author = {Griffin, Benjamin},
abstractNote = {Abstract not provided.},
doi = {},
url = {https://www.osti.gov/biblio/1244916},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 2015},
month = {Thu Jan 01 00:00:00 EST 2015}
}
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.