In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices

Bein, Benjamin; Hsing, Hsiang-Chun; Callori, Sara J.; Sinsheimer, John; Chinta, Priya V.; Headrick, Randall L.; Dawber, Matthew

doi:10.1038/ncomms10136

Title: In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices

Abstract

In the epitaxially strained ferroelectric thin films and superlattices, the ferroelectric transition temperature can lie above the growth temperature. Ferroelectric polarization and domains should then evolve during the growth of a sample, and electrostatic boundary conditions may play an important role. In this work, ferroelectric domains, surface termination, average lattice parameter and bilayer thickness are simultaneously monitored using in situ synchrotron X-ray diffraction during the growth of BaTiO₃/SrTiO₃ superlattices on SrTiO₃ substrates by off-axis radio frequency magnetron sputtering. The technique used allows for scan times substantially faster than the growth of a single layer of material. Effects of electric boundary conditions are investigated by growing the same superlattice alternatively on SrTiO₃ substrates and 20 nm SrRuO₃ thin films on SrTiO₃ substrates. Our experiments provide important insights into the formation and evolution of ferroelectric domains when the sample is ferroelectric during the growth process.

Authors:

Bein, Benjamin ^[1]; Hsing, Hsiang-Chun ^[1]; Callori, Sara J. ^[1]; Sinsheimer, John ^[1]; Chinta, Priya V. ^[2]; Headrick, Randall L. ^[2]; Dawber, Matthew ^[1]

Stony Brook Univ., NY (United States)
Univ. of Vermont, Burlington, VT (United States)

Publication Date:: Fri Dec 04 00:00:00 EST 2015

Research Org.:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1240624

Grant/Contract Number:: AC02-98CH10886

Resource Type:: Journal Article: Accepted Manuscript

Journal Name:: Nature Communications

Additional Journal Information:: Journal Volume: 6; Journal ID: ISSN 2041-1723

Publisher:: Nature Publishing Group

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats


                    Bein, Benjamin, Hsing, Hsiang-Chun, Callori, Sara J., Sinsheimer, John, Chinta, Priya V., Headrick, Randall L., and Dawber, Matthew. In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices.  United States: N. p., 2015. 
        Web.  doi:10.1038/ncomms10136.

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                    Bein, Benjamin, Hsing, Hsiang-Chun, Callori, Sara J., Sinsheimer, John, Chinta, Priya V., Headrick, Randall L., & Dawber, Matthew. In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices.  United States.  https://doi.org/10.1038/ncomms10136

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                    Bein, Benjamin, Hsing, Hsiang-Chun, Callori, Sara J., Sinsheimer, John, Chinta, Priya V., Headrick, Randall L., and Dawber, Matthew. 2015.  
        "In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices".  United States.  https://doi.org/10.1038/ncomms10136.  https://www.osti.gov/servlets/purl/1240624.

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@article{osti_1240624,

  title        = {In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices},

  author       = {Bein, Benjamin and Hsing, Hsiang-Chun and Callori, Sara J. and Sinsheimer, John and Chinta, Priya V. and Headrick, Randall L. and Dawber, Matthew},

  abstractNote = {In the epitaxially strained ferroelectric thin films and superlattices, the ferroelectric transition temperature can lie above the growth temperature. Ferroelectric polarization and domains should then evolve during the growth of a sample, and electrostatic boundary conditions may play an important role. In this work, ferroelectric domains, surface termination, average lattice parameter and bilayer thickness are simultaneously monitored using in situ synchrotron X-ray diffraction during the growth of BaTiO3/SrTiO3 superlattices on SrTiO3 substrates by off-axis radio frequency magnetron sputtering. The technique used allows for scan times substantially faster than the growth of a single layer of material. Effects of electric boundary conditions are investigated by growing the same superlattice alternatively on SrTiO3 substrates and 20 nm SrRuO3 thin films on SrTiO3 substrates. Our experiments provide important insights into the formation and evolution of ferroelectric domains when the sample is ferroelectric during the growth process.},

  doi          = {10.1038/ncomms10136},

  url          = {https://www.osti.gov/biblio/1240624},
  journal      = {Nature Communications},

  issn         = {2041-1723},

  number       = ,

  volume       = 6,

  place        = {United States},

  year         = {Fri Dec 04 00:00:00 EST 2015},

  month        = {Fri Dec 04 00:00:00 EST 2015}

}

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Rare-earth (RE) doped Ba(Zr,Ti)O{sub 3} (BZT) thin films were prepared by rf-magnetron sputtering from a Ba{sub 0.90}Ln{sub 0.067}Zr{sub 0.09}Ti{sub 0.91}O{sub 3} (Ln=La, Nd) target. The films were deposited at a substrate temperature of 600 deg. C in a high oxygen pressure atmosphere. X-ray diffraction (XRD) patterns of RE-BZT films revealed a <001> epitaxial crystal growth on Nb-doped SrTiO{sub 3}, <001> and <011> growth on single-crystal Si, and a <111>-preferred orientation on Pt-coated Si substrates. Scanning electron microscopy (SEM) showed uniform growth of the films deposited, along with the presence of crystals of about half-micron size on the film's surface. Transmissionmore »« less
https://doi.org/10.1016/j.jssc.2009.07.013
Single-crystal Pb(Zr{sub x}Ti{sub 1{minus}x})O{sub 3} thin films prepared by metal-organic chemical vapor deposition: Systematic compositional variation of electronic and optical properties

Journal Article Foster, C; Bai, G; Csencsits, R; ... - Journal of Applied Physics

Single-crystal thin films of Pb(Zr{sub x}Ti{sub 1{minus}x})O{sub 3} (PZT) covering the full compositional range (0{le}{ital x}{le}1) were deposited by metal-organic chemical vapor deposition. Epitaxial SrRuO{sub 3}(001) thin films grown on SrTiO{sub 3}(001) substrates by rf-magnetron sputter deposition served as template electrode layers. X-ray diffraction, energy-dispersive x-ray spectroscopy, atomic force microscopy, transmission electron microscopy, and optical waveguiding were used to characterize the crystalline structure, composition, surface morphology, microstructure, refractive index, and film thickness of the deposited films. The PZT films were single crystalline for all compositions exhibiting cube-on-cube growth epitaxy with the substrate and showed very high degrees of crystallinity andmore »« less
https://doi.org/10.1063/1.364239

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Title: In situ X-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices

Abstract

Citation Formats

Critical thickness for ferroelectricity in perovskite ultrathin films journal, April 2003

Depolarization corrections to the coercive field in thin-film ferroelectrics journal, June 2003

Ferroelectricity and Tetragonality in Ultrathin P b T i O 3 Films journal, February 2005

Observation of Nanoscale 180 ° Stripe Domains in Ferroelectric P b T i O 3 Thin Films journal, July 2002

Ferroelectricity in Ultrathin Perovskite Films journal, June 2004

In-situ x-ray diffraction study of the growth of highly strained epitaxial BaTiO 3 thin films journal, December 2013

q Dependence of the Growth-Oscillation Period of X-Ray Reflectivity in Heteroepitaxy: Ho/W(110) journal, November 1997

Real-time studies of thin film growth: Measurement and analysis of X-ray growth oscillations beyond the anti-Bragg point journal, February 2009

Unravelling the multilayer growth of the fullerene C60 in real time journal, November 2014

The power of in situ pulsed laser deposition synchrotron characterization for the detection of domain formation during growth of Ba 0.5 Sr 0.5 TiO 3 on MgO journal, January 2014

In situ Synchrotron X-Ray Studies of Ferroelectric thin Films journal, August 2006

Transition from laminar to three-dimensional growth mode in pulsed laser deposited BiFeO 3 film on (001) SrTiO 3 journal, November 2012

Formation of artificial BaTiO 3 /SrTiO 3 superlattices using pulsed laser deposition and their dielectric properties journal, October 1994

Structural Refinement of X-Ray Diffraction Profile for Artificial Superlattices journal, January 2000

Epitaxial growth and dielectric properties of (111) oriented BaTiO3/SrTiO3 superlattices by pulsed-laser deposition journal, November 2000

Enhancement of remanent polarization in epitaxial BaTiO3/SrTiO3 superlattices with “asymmetric” structure journal, February 2002

Theory of polarization enhancement in epitaxial BaTiO3/SrTiO3 superlattices journal, March 2003

First-principles study of symmetry lowering and polarization in Ba Ti O 3 ∕ Sr Ti O 3 superlattices with in-plane expansion journal, March 2005

Phase transitions and polarizations in epitaxial BaTiO3/SrTiO3 superlattices studied by second-harmonic generation journal, January 2003

Orthorhombic strontium titanate in BaTiO 3 –SrTiO 3 superlattices journal, May 2003

Quantification of Internal Electric Fields and Local Polarization in Ferroelectric Superlattices journal, December 2010

Surface X-Ray Scattering during Crystal Growth: Ge on Ge(111) journal, November 1988

In situ x-ray scattering study of PbTiO3 chemical-vapor deposition journal, March 2002

In situ monitoring during pulsed laser deposition of complex oxides using reflection high energy electron diffraction under high oxygen pressure journal, April 1997

X-ray reciprocal space mapping of dislocation-mediated strain relaxation during InGaAs/GaAs(001) epitaxial growth journal, December 2011

Unusual Behavior of the Ferroelectric Polarization in PbTiO 3 / SrTiO 3 Superlattices journal, October 2005

Surface polarization, rumpling, and domain ordering of strained ultrathin BaTiO 3 (001) films with in-plane and out-of-plane polarization journal, July 2014

Enhancement of Ferroelectricity in Strained BaTiO3 Thin Films journal, November 2004

Phase transitions and strain-induced ferroelectricity in SrTiO 3 epitaxial thin films journal, January 2000

Electrostatic Coupling and Local Structural Distortions at Interfaces in Ferroelectric/Paraelectric Superlattices journal, May 2012

Growth of homoepitaxial SrTiO3 thin films by molecular-beam epitaxy journal, April 2009

Tailoring the Properties of Artificially Layered Ferroelectric Superlattices journal, December 2007

Structural and energetic properties of domains in PbTiO 3 /SrTiO 3 superlattices from first principles journal, May 2012

Space charges and size effects in semiconducting ferroelectric BaTiO3/SrTiO3 superlattices journal, July 2010

A phenomenological thermodynamic potential for BaTiO3 single crystals journal, September 2005

Theory of the Structure of Ferromagnetic Domains in Films and Small Particles journal, December 1946

Ferroelectricity in Ultrathin BaTiO 3 Films: Probing the Size Effect by Ultraviolet Raman Spectroscopy journal, October 2009

Unusual static and dynamical characteristics of domain evolution in ferroelectric superlattices journal, January 2009

X-Ray Diffraction Studies of 180° Ferroelectric Domains in PbTiO 3 / SrTiO 3 Superlattices under an Applied Electric Field journal, May 2010

Nanosecond Dynamics of Ferroelectric/Dielectric Superlattices journal, July 2011

Field-Dependent Domain Distortion and Interlayer Polarization Distribution in PbTiO 3 / SrTiO 3 Superlattices journal, January 2013

High-temperature ferroelectric domain stability in epitaxial PbZr0.2Ti0.8O3 thin films journal, April 2006

Thermal quench effects on ferroelectric domain walls journal, June 2012

Effect of phase transition on the surface potential of the BaTiO3 (100) surface by variable temperature scanning surface potential microscopy journal, April 2000

Temperature dependence of polarization and charge dynamics on the BaTiO3(100) surface by scanning probe microscopy journal, February 2001

Domain wall nanoelectronics journal, February 2012

Elements of Modern X-ray Physics book, March 2011

Electrostatic Coupling and Local Structural Distortions at Interfaces in Ferroelectric/Paraelectric Superlattices journal, May 2012

Quantification of Internal Electric Fields and Local Polarization in Ferroelectric Superlattices journal, December 2010

In situ monitoring during pulsed laser deposition of complex oxides using reflection high energy electron diffraction under high oxygen pressure journal, April 1997

High-temperature ferroelectric domain stability in epitaxial PbZr0.2Ti0.8O3 thin films journal, April 2006

Depolarization corrections to the coercive field in thin-film ferroelectrics journal, June 2003

Domain annihilation due to temperature and thickness gradients in single-crystal BaTiO 3 journal, February 2012

Enhancement of Ferroelectricity in Strained BaTiO3 Thin Films journal, November 2004

Thermal quench effects on ferroelectric domain walls text, January 2012

Large Polarization and Susceptibilities in Artificial Morphotropic Phase Boundary PbZr 1− x Ti x O 3 Superlattices journal, January 2020

Picoscale materials engineering journal, September 2017

Nanoscale design of polarization in ultrathin ferroelectric heterostructures journal, November 2017

Domain alignment within ferroelectric/dielectric PbTiO 3 /SrTiO 3 superlattice nanostructures journal, January 2018

Interface-induced enhancement of piezoelectricity in the (SrTiO 3 ) m /(BaTiO 3 ) M−m superlattice for energy harvesting applications journal, January 2019

Rotational polarization nanotopologies in BaTiO 3 /SrTiO 3 superlattices journal, January 2019

Thin film growth studies using time-resolved x-ray scattering journal, November 2016

Depolarizing-Field Effects in Epitaxial Capacitor Heterostructures journal, October 2019

Quick X-ray reflectivity using monochromatic synchrotron radiation for time-resolved applications journal, April 2018

Single-beam lifetime measurements via self-induced optical absorption journal, January 2019

Design and Manipulation of Ferroic Domains in Complex Oxide Heterostructures journal, September 2019

Depolarizing-Field Effects in Epitaxial Capacitor Heterostructures text, January 2019

Probing ferroic states in oxide thin films using optical second harmonic generation text, January 2018

Design and Manipulation of Ferroic Domains in Complex Oxide Heterostructures text, January 2019

Nanoscale design of polarization in ultrathin ferroelectric heterostructures text, January 2017

Quick X-ray Reflectivity using Monochromatic Synchrotron Radiation for Time-Resolved Applications text, January 2017

Rotational polarization nanotopologies in BaTiO3/SrTiO3 superlattices text, January 2019

Domain alignment within ferroelectric/dielectric PbTiO$_3$/SrTiO$_3$ superlattice nanostructures text, January 2020

Decoupling the refractive index from the electrical properties of transparent conducting oxides via periodic superlattices journal, September 2016

Nanoscale design of polarization in ultrathin ferroelectric heterostructures text, January 2017

Critical thickness for ferroelectricity in perovskite ultrathin films
journal, April 2003

Depolarization corrections to the coercive field in thin-film ferroelectrics
journal, June 2003

Ferroelectricity and Tetragonality in Ultrathin ${P b T i O}_{3}$ Films
journal, February 2005

Observation of Nanoscale $180 °$ Stripe Domains in Ferroelectric ${P b T i O}_{3}$ Thin Films
journal, July 2002

Ferroelectricity in Ultrathin Perovskite Films
journal, June 2004

In-situ x-ray diffraction study of the growth of highly strained epitaxial BaTiO ₃ thin films
journal, December 2013

$q$ Dependence of the Growth-Oscillation Period of X-Ray Reflectivity in Heteroepitaxy: Ho/W(110)
journal, November 1997

Real-time studies of thin film growth: Measurement and analysis of X-ray growth oscillations beyond the anti-Bragg point
journal, February 2009

Unravelling the multilayer growth of the fullerene C60 in real time
journal, November 2014

The power of in situ pulsed laser deposition synchrotron characterization for the detection of domain formation during growth of Ba _0.5 Sr _0.5 TiO ₃ on MgO
journal, January 2014

In situ Synchrotron X-Ray Studies of Ferroelectric thin Films
journal, August 2006

Transition from laminar to three-dimensional growth mode in pulsed laser deposited BiFeO ₃ film on (001) SrTiO ₃
journal, November 2012

Formation of artificial BaTiO ₃ /SrTiO ₃ superlattices using pulsed laser deposition and their dielectric properties
journal, October 1994

Structural Refinement of X-Ray Diffraction Profile for Artificial Superlattices
journal, January 2000

Epitaxial growth and dielectric properties of (111) oriented BaTiO3/SrTiO3 superlattices by pulsed-laser deposition
journal, November 2000

Enhancement of remanent polarization in epitaxial BaTiO3/SrTiO3 superlattices with “asymmetric” structure
journal, February 2002

Theory of polarization enhancement in epitaxial BaTiO3/SrTiO3 superlattices
journal, March 2003

First-principles study of symmetry lowering and polarization in $Ba Ti O_{3} ∕ Sr Ti O_{3}$ superlattices with in-plane expansion
journal, March 2005

Phase transitions and polarizations in epitaxial BaTiO3/SrTiO3 superlattices studied by second-harmonic generation
journal, January 2003

Orthorhombic strontium titanate in BaTiO ₃ –SrTiO ₃ superlattices
journal, May 2003

Quantification of Internal Electric Fields and Local Polarization in Ferroelectric Superlattices
journal, December 2010

Surface X-Ray Scattering during Crystal Growth: Ge on Ge(111)
journal, November 1988

In situ x-ray scattering study of PbTiO3 chemical-vapor deposition
journal, March 2002

In situ monitoring during pulsed laser deposition of complex oxides using reflection high energy electron diffraction under high oxygen pressure
journal, April 1997

X-ray reciprocal space mapping of dislocation-mediated strain relaxation during InGaAs/GaAs(001) epitaxial growth
journal, December 2011

Unusual Behavior of the Ferroelectric Polarization in ${PbTiO}_{3} / {SrTiO}_{3}$ Superlattices
journal, October 2005

Surface polarization, rumpling, and domain ordering of strained ultrathin ${BaTiO}_{3}$ (001) films with in-plane and out-of-plane polarization
journal, July 2014

Enhancement of Ferroelectricity in Strained BaTiO₃ Thin Films
journal, November 2004

Phase transitions and strain-induced ferroelectricity in ${SrTiO}_{3}$ epitaxial thin films
journal, January 2000

Electrostatic Coupling and Local Structural Distortions at Interfaces in Ferroelectric/Paraelectric Superlattices
journal, May 2012

Growth of homoepitaxial SrTiO3 thin films by molecular-beam epitaxy
journal, April 2009

Tailoring the Properties of Artificially Layered Ferroelectric Superlattices
journal, December 2007

Structural and energetic properties of domains in PbTiO $_{3}$ /SrTiO $_{3}$ superlattices from first principles
journal, May 2012

Space charges and size effects in semiconducting ferroelectric BaTiO3/SrTiO3 superlattices
journal, July 2010

A phenomenological thermodynamic potential for BaTiO3 single crystals
journal, September 2005

Theory of the Structure of Ferromagnetic Domains in Films and Small Particles
journal, December 1946

Ferroelectricity in Ultrathin ${BaTiO}_{3}$ Films: Probing the Size Effect by Ultraviolet Raman Spectroscopy
journal, October 2009

Unusual static and dynamical characteristics of domain evolution in ferroelectric superlattices
journal, January 2009

X-Ray Diffraction Studies of 180° Ferroelectric Domains in ${PbTiO}_{3} / {SrTiO}_{3}$ Superlattices under an Applied Electric Field
journal, May 2010

Nanosecond Dynamics of Ferroelectric/Dielectric Superlattices
journal, July 2011

Field-Dependent Domain Distortion and Interlayer Polarization Distribution in ${PbTiO}_{3} / {SrTiO}_{3}$ Superlattices
journal, January 2013

High-temperature ferroelectric domain stability in epitaxial PbZr0.2Ti0.8O3 thin films
journal, April 2006

Thermal quench effects on ferroelectric domain walls
journal, June 2012

Effect of phase transition on the surface potential of the BaTiO3 (100) surface by variable temperature scanning surface potential microscopy
journal, April 2000

Temperature dependence of polarization and charge dynamics on the BaTiO3(100) surface by scanning probe microscopy
journal, February 2001

Domain wall nanoelectronics
journal, February 2012

Elements of Modern X-ray Physics
book, March 2011

Electrostatic Coupling and Local Structural Distortions at Interfaces in Ferroelectric/Paraelectric Superlattices
journal, May 2012

Quantification of Internal Electric Fields and Local Polarization in Ferroelectric Superlattices
journal, December 2010

In situ monitoring during pulsed laser deposition of complex oxides using reflection high energy electron diffraction under high oxygen pressure
journal, April 1997

High-temperature ferroelectric domain stability in epitaxial PbZr0.2Ti0.8O3 thin films
journal, April 2006

Depolarization corrections to the coercive field in thin-film ferroelectrics
journal, June 2003

Domain annihilation due to temperature and thickness gradients in single-crystal BaTiO $_{3}$
journal, February 2012

Enhancement of Ferroelectricity in Strained BaTiO₃ Thin Films
journal, November 2004

Thermal quench effects on ferroelectric domain walls
text, January 2012

Large Polarization and Susceptibilities in Artificial Morphotropic Phase Boundary PbZr ₁₋ _x Ti _x O ₃ Superlattices
journal, January 2020

Picoscale materials engineering
journal, September 2017

Nanoscale design of polarization in ultrathin ferroelectric heterostructures
journal, November 2017

Domain alignment within ferroelectric/dielectric PbTiO ₃ /SrTiO ₃ superlattice nanostructures
journal, January 2018

Interface-induced enhancement of piezoelectricity in the (SrTiO ₃ ) _m /(BaTiO ₃ ) _M−m superlattice for energy harvesting applications
journal, January 2019

Rotational polarization nanotopologies in BaTiO ₃ /SrTiO ₃ superlattices
journal, January 2019

Thin film growth studies using time-resolved x-ray scattering
journal, November 2016

Depolarizing-Field Effects in Epitaxial Capacitor Heterostructures
journal, October 2019

Quick X-ray reflectivity using monochromatic synchrotron radiation for time-resolved applications
journal, April 2018

Single-beam lifetime measurements via self-induced optical absorption
journal, January 2019

Design and Manipulation of Ferroic Domains in Complex Oxide Heterostructures
journal, September 2019

Depolarizing-Field Effects in Epitaxial Capacitor Heterostructures
text, January 2019

Probing ferroic states in oxide thin films using optical second harmonic generation
text, January 2018

Design and Manipulation of Ferroic Domains in Complex Oxide Heterostructures
text, January 2019

Nanoscale design of polarization in ultrathin ferroelectric heterostructures
text, January 2017

Quick X-ray Reflectivity using Monochromatic Synchrotron Radiation for Time-Resolved Applications
text, January 2017

Rotational polarization nanotopologies in BaTiO3/SrTiO3 superlattices
text, January 2019

Domain alignment within ferroelectric/dielectric PbTiO$_3$/SrTiO$_3$ superlattice nanostructures
text, January 2020

Decoupling the refractive index from the electrical properties of transparent conducting oxides via periodic superlattices
journal, September 2016

Nanoscale design of polarization in ultrathin ferroelectric heterostructures
text, January 2017