Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors

Rahman, B. M. Farid; Divan, Ralu; Rosenmann, Daniel; Wang, Tengxing; Peng, Yujia; Wang, Guoan

doi:10.1063/1.4918766

Title: Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors

Journal Article · Tue Apr 21 00:00:00 EDT 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4918766· OSTI ID:1239556

Rahman, B. M. Farid ^[1]; Divan, Ralu ^[2]; Rosenmann, Daniel ^[2];

^[3]; Peng, Yujia ^[3];

^[3]

Intel Corp., Hillsboro, OR (United States)
Argonne National Lab. (ANL), Lemont, IL (United States)
Univ. of South Carolina, Columbia, SC (United States)

Electrical tunable meander line inductor using coplanar waveguide structures with patterned permalloy (Py) thin film has been designed and implemented in this paper. High resistivity Si substrate is used to reduce the dielectric loss from the substrate. Inductor is implemented with a 60 nm thick Py deposited and patterned on top of the gold meander line, and Py film is patterned with dimension of 440 nm 10 lm to create the shape anisotropy field, which in turn increases the FMR frequency. Compared to a regular meanderline inductor without the application of sub-micrometer patterned Py thin film, the inductance density has been increased to 20% for the implemented inductor with patterned Py. Measured FMR frequency of the patterned Py is 4.51 GHz without the application of any external magnetic field. This has enabled the inductor application in the practical circuit boards, where the large external magnet is unavailable. Inductance tunability of the implemented inductor is demonstrated by applying a DC current. Applied DC current creates a magnetic field along the hard axis of the patterned Py thin film, which changes the magnetic moment of the thin film and thus, decreases the inductance of the line. Here, the measured results show that the inductance density of the inductor can be varied 5% by applying 300 mA DC current, larger inductance tunability is achievable by increasing the thickness of Py film.

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Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357; 125392

OSTI ID:: 1239556

Journal Information:: Journal of Applied Physics, Vol. 117, Issue 17; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 11 works

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References (12)

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