Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges

Lieberman, M. A.; Lichtenberg, A. J.; Kawamura, E.; Marakhtanov, A. M.

doi:10.1088/0963-0252/24/5/055011

Title: Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges

Journal Article · Thu Aug 27 00:00:00 EDT 2015 · Plasma Sources Science and Technology

DOI:https://doi.org/10.1088/0963-0252/24/5/055011· OSTI ID:1239007

Lieberman, M. A.; Lichtenberg, A. J.; Kawamura, E.; Marakhtanov, A. M.

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Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC000193

OSTI ID:: 1239007

Journal Information:: Plasma Sources Science and Technology, Journal Name: Plasma Sources Science and Technology Vol. 24 Journal Issue: 5; ISSN 0963-0252

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 39 works

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References (35)

Electromagnetic field nonuniformities in large area, high-frequency capacitive plasma reactors, including electrode asymmetry effects Sansonnens, L.; Howling, A. A.; Hollenstein, Ch Plasma Sources Science and Technology, Vol. 15, Issue 3 https://doi.org/10.1088/0963-0252/15/3/002	journal	March 2006
Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge Chabert, P.; Raimbault, J. L.; Rax, J. M. Physics of Plasmas, Vol. 11, Issue 5 https://doi.org/10.1063/1.1688334	journal	May 2004
Principles of Plasma Discharges and Materials Processing Lieberman, Michael A.; Lichtenberg, Allan J. https://doi.org/10.1002/0471724254	book	January 2005
Self-consistent simulation of very high frequency capacitively coupled plasmas Rauf, Shahid; Bera, Kallol; Collins, Ken Plasma Sources Science and Technology, Vol. 17, Issue 3 https://doi.org/10.1088/0963-0252/17/3/035003	journal	May 2008
Standing wave and skin effects in large-area, high-frequency capacitive discharges Lieberman, M. A.; Booth, J. P.; Chabert, P. Plasma Sources Science and Technology, Vol. 11, Issue 3 https://doi.org/10.1088/0963-0252/11/3/310	journal	June 2002
Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge Barnat, E. V.; Miller, P. A.; Hebner, G. A. Plasma Sources Science and Technology, Vol. 16, Issue 2 https://doi.org/10.1088/0963-0252/16/2/016	journal	March 2007
Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma Yamazawa, Yohei Applied Physics Letters, Vol. 95, Issue 19 https://doi.org/10.1063/1.3261752	journal	November 2009
Self-consistent electrodynamics of large-area high-frequency capacitive plasma discharge Chen, Zhigang; Rauf, Shahid; Collins, Ken Journal of Applied Physics, Vol. 108, Issue 7 https://doi.org/10.1063/1.3489950	journal	October 2010
Effect of resonance in external radio-frequency circuit on very high frequency plasma discharge Rauf, Shahid; Chen, Zhigang; Collins, Ken Journal of Applied Physics, Vol. 107, Issue 9 https://doi.org/10.1063/1.3406153	journal	May 2010
Resonance-Sustained Radio Frequency Discharges Taillet, J. American Journal of Physics, Vol. 37, Issue 4 https://doi.org/10.1119/1.1975598	journal	April 1969
Sheath motion in a capacitively coupled radio frequency discharge Wood, B. P.; Lieberman, M. A.; Lichtenberg, A. J. IEEE Transactions on Plasma Science, Vol. 19, Issue 4 https://doi.org/10.1109/27.90327	journal	January 1991
Electromagnetic effects in high-frequency large-area capacitive discharges: A review Liu, Yong-Xin; Zhang, Yu-Ru; Bogaerts, Annemie Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 2 https://doi.org/10.1116/1.4907926	journal	March 2015
Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma Bora, B.; Bhuyan, H.; Favre, M. Applied Physics Letters, Vol. 100, Issue 9 https://doi.org/10.1063/1.3690870	journal	February 2012
Fast 2D hybrid fluid-analytical simulation of inductive/capacitive discharges Kawamura, E.; Graves, D. B.; Lieberman, M. A. Plasma Sources Science and Technology, Vol. 20, Issue 3 https://doi.org/10.1088/0963-0252/20/3/035009	journal	April 2011
Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach Mussenbrock, T.; Brinkmann, R. P.; Lieberman, M. A. Physical Review Letters, Vol. 101, Issue 8 https://doi.org/10.1103/PhysRevLett.101.085004	journal	August 2008
Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma Bora, B.; Bhuyan, H.; Favre, M. Physics of Plasmas, Vol. 18, Issue 10 https://doi.org/10.1063/1.3646317	journal	October 2011
Nonlinear electron resonance heating in capacitive radio frequency discharges Mussenbrock, Thomas; Brinkmann, Ralf Peter Applied Physics Letters, Vol. 88, Issue 15 https://doi.org/10.1063/1.2194824	journal	April 2006
Shaped electrode and lens for a uniform radio-frequency capacitive plasma Sansonnens, L.; Schmitt, J. Applied Physics Letters, Vol. 82, Issue 2 https://doi.org/10.1063/1.1534918	journal	January 2003
Displacement current and multiple pulse effects in plasma source ion implantation Wood, Blake P. Journal of Applied Physics, Vol. 73, Issue 10 https://doi.org/10.1063/1.353841	journal	May 1993
Ion energy uniformity in high-frequency capacitive discharges Perret, A.; Chabert, P.; Jolly, J. Applied Physics Letters, Vol. 86, Issue 2 https://doi.org/10.1063/1.1848183	journal	January 2005
Comment on “Ion energy uniformity in high-frequency capacitive discharges” [Appl. Phys. Lett. 86, 021501 (2005)] Howling, A. A.; Sansonnens, L.; Schmidt, H. Applied Physics Letters, Vol. 87, Issue 7 https://doi.org/10.1063/1.2012528	journal	August 2005
Nonlinear plasma dynamics in capacitive radio frequency discharges Mussenbrock, Thomas; Brinkmann, Ralf Peter Plasma Sources Science and Technology, Vol. 16, Issue 2 https://doi.org/10.1088/0963-0252/16/2/022	journal	April 2007
Ion flux nonuniformities in large-area high-frequency capacitive discharges Perret, A.; Chabert, P.; Booth, J. -P. Applied Physics Letters, Vol. 83, Issue 2 https://doi.org/10.1063/1.1592617	journal	July 2003
Electron series resonant discharges: comparison between simulation and experiment Qiu, W. D.; Bowers, K. J.; Birdsall, C. K. Plasma Sources Science and Technology, Vol. 12, Issue 1 https://doi.org/10.1088/0963-0252/12/1/308	journal	January 2003
A nonlinear global model of a dual frequency capacitive discharge Mussenbrock, Thomas; Ziegler, Dennis; Peter Brinkmann, Ralf Physics of Plasmas, Vol. 13, Issue 8 https://doi.org/10.1063/1.2244525	journal	August 2006
The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges Lieberman, M. A.; Lichtenberg, A. J.; Kawamura, E. Physics of Plasmas, Vol. 15, Issue 6 https://doi.org/10.1063/1.2928847	journal	June 2008
Regular and Chaotic Dynamics Lichtenberg, A. J.; Lieberman, M. A. Applied Mathematical Sciences https://doi.org/10.1007/978-1-4757-2184-3	book	January 1992
Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation Eremin, Denis; Hemke, Torben; Brinkmann, Ralf Peter Journal of Physics D: Applied Physics, Vol. 46, Issue 8 https://doi.org/10.1088/0022-3727/46/8/084017	journal	February 2013
Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description Czarnetzki, U.; Mussenbrock, T.; Brinkmann, R. P. Physics of Plasmas, Vol. 13, Issue 12 https://doi.org/10.1063/1.2397043	journal	December 2006
Effect of electromagnetic waves and higher harmonics in capacitively coupled plasma phenomena Upadhyay, R. R.; Sawada, I.; Ventzek, P. L. G. Journal of Physics D: Applied Physics, Vol. 46, Issue 47 https://doi.org/10.1088/0022-3727/46/47/472001	journal	November 2013
Nonlinearity of the radio‐frequency sheath Klick, Michael Journal of Applied Physics, Vol. 79, Issue 7 https://doi.org/10.1063/1.361392	journal	April 1996
Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor Miller, Paul A.; Barnat, Edward V.; Hebner, Gregory A. Plasma Sources Science and Technology, Vol. 15, Issue 4 https://doi.org/10.1088/0963-0252/15/4/036	journal	October 2006
Fluid modelling of capacitively coupled radio-frequency discharges: a review Alves, L. L.; Marques, L. Plasma Physics and Controlled Fusion, Vol. 54, Issue 12 https://doi.org/10.1088/0741-3335/54/12/124012	journal	November 2012
Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas Zhang, Yu-Ru; Xu, Xiang; Zhao, Shu-Xia Physics of Plasmas, Vol. 17, Issue 11 https://doi.org/10.1063/1.3519515	journal	November 2010
Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber Hebner, Gregory A.; Barnat, Edward V.; Miller, Paul A. Plasma Sources Science and Technology, Vol. 15, Issue 4 https://doi.org/10.1088/0963-0252/15/4/035	journal	October 2006

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