skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera

Journal Article · · Superconductor Science and Technology
 [1];  [2];  [3];  [4];  [5];  [6];  [6];  [7];  [1];  [6];  [6];  [8];  [1];  [9];  [10];  [11];  [12];  [1];  [12];  [9] more »;  [13];  [10];  [14];  [9];  [14];  [11];  [15];  [10];  [16];  [11];  [16];  [3];  [11];  [17];  [18];  [3];  [19];  [10];  [1];  [10];  [12];  [9];  [11];  [20];  [10];  [18];  [1];  [21];  [10];  [1];  [22];  [22];  [23];  [14];  [10];  [12];  [24];  [10];  [10];  [11];  [3];  [2];  [25];  [20];  [1];  [11];  [1];  [3];  [10] « less
  1. Argonne National Lab. (ANL), Argonne, IL (United States)
  2. Cardiff Univ. (United Kingdom)
  3. Stanford Univ., CA (United States); SLAC National Accelerator Lab., Menlo Park, CA (United States)
  4. Univ. of California, San Diego, CA (United States)
  5. Univ. of Colorado, Boulder, CO (United States); National Inst. of Standards and Technology (NIST), Boulder, CO (United States). Quantum Devices Group
  6. Argonne National Lab. (ANL), Argonne, IL (United States); Univ. of Chicago, IL (United States)
  7. Univ. of Chicago, IL (United States); Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
  8. SLAC National Accelerator Lab., Menlo Park, CA (United States)
  9. McGill Univ., Montreal, QC (Canada)
  10. Univ. of Chicago, IL (United States)
  11. Univ. of California, Berkeley, CA (United States)
  12. Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
  13. McGill Univ., Montreal, QC (Canada); Canadian Inst. for Advanced Research (CIFAR), Toronto, ON (Canada)
  14. Univ. of Colorado, Boulder, CO (United States)
  15. High Energy Accelerator Research Organization (KEK), Tsukuba (Japan)
  16. National Inst. of Standards and Technology (NIST), Boulder, CO (United States). Quantum Devices Group
  17. Stanford Univ., CA (United States)
  18. Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
  19. Univ. of California, Berkeley, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  20. Univ. of Illinois at Urbana-Champaign, IL (United States)
  21. California Inst. of Technology (CalTech), Pasadena, CA (United States)
  22. Case Western Reserve Univ., Cleveland, OH (United States)
  23. Harvard-Smithsonian Center for Astrophysics, Cambridge, MA (United States)
  24. Three-Speed Logic, Inc., Vancouver, BC (Canada)
  25. Univ. of Toronto, ON (Canada)
+ Show Author Affiliations

This paper presents the procedures used by Argonne National Laboratory to fabricate large arrays of multichroic transition-edge sensor (TES) bolometers for cosmic microwave background (CMB) measurements. These detectors will be assembled into the focal plane for the SPT-3G camera, the third generation CMB camera to be installed in the South Pole Telescope. The complete SPT-3G camera will have approximately 2690 pixels, for a total of 16,140 TES bolometric detectors. Each pixel is comprised of a broad-band sinuous antenna coupled to a Nb microstrip line. In-line filters are used to define the different band-passes before the millimeter-wavelength signal is fed to the respective Ti/Au TES bolometers. There are six TES bolometer detectors per pixel, which allow for measurements of three band-passes (95 GHz, 150 GHz and 220 GHz) and two polarizations. The steps involved in the monolithic fabrication of these detector arrays are presented here in detail. Patterns are defined using a combination of stepper and contact lithography. The misalignment between layers is kept below 200 nm. The overall fabrication involves a total of 16 processes, including reactive and magnetron sputtering, reactive ion etching, inductively coupled plasma etching and chemical etching.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), High Energy Physics (HEP); USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); Kavli Foundation; Gordon and Betty Moore Foundation
Grant/Contract Number:
SC0015640; AC02-06CH11357; ANT-0638937; PHY-1125897; AST-0956135; AST-1402161
OSTI ID:
1594616
Alternate ID(s):
OSTI ID: 1238854
Journal Information:
Superconductor Science and Technology, Vol. 28, Issue 9; ISSN 0953-2048
Publisher:
IOP PublishingCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 30 works
Citation information provided by
Web of Science

References (26)

The Atacama Cosmology Telescope: cosmological parameters from three seasons of data journal October 2013
Structure in the COBE differential microwave radiometer first-year maps journal September 1992
A Study of Al–Mn Transition Edge Sensor Engineering for Stability journal January 2014
Josephson effects in an alternating current biased transition edge sensor journal October 2014
A Measurement of the Cosmic Microwave Background Damping tail from the 2500-Square-Degree Spt-Sz Survey journal November 2013
Multi-Chroic Dual-Polarization Bolometric Detectors for Studies of the Cosmic Microwave Background journal January 2014
Mo/Au Bilayer Superconducting Transition Edge Sensor Tuning With Surface Modification Structures journal June 2013
Superconducting Penetration Depth of Niobium journal August 1965
Longitudinal Proximity Effects in Superconducting Transition-Edge Sensors journal January 2010
Development of a superconducting X-ray microcalorimeter with a titanium/gold thin film as a thermometer
  • Fujimoto, R.; Mitsuda, K.; Miyazaki, T.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 444, Issue 1-2 https://doi.org/10.1016/S0168-9002(99)01353-4
journal April 2000
The case for the relativistic hot Big Bang cosmology journal August 1991
Planck 2013 results. XVI. Cosmological parameters journal October 2014
Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope journal June 2013
Multi-chroic Dual-Polarization Bolometric Focal Plane for Studies of the Cosmic Microwave Background journal March 2012
Digital frequency domain multiplexing readout electronics for the next generation of millimeter telescopes conference July 2014
An application of electrothermal feedback for high resolution cryogenic particle detection journal April 1995
Thermal Design and Characterization of Transition-Edge Sensor (TES) Bolometers for Frequency-Domain Multiplexing journal June 2009
Millimeter-Wave Lumped Element Superconducting Bandpass Filters for Multi-Color Imaging journal June 2009
Cosmic Black-Body Radiation. journal July 1965
A Measurement of Excess Antenna Temperature at 4080 Mc/s. journal July 1965
NINE-YEAR WILKINSON MICROWAVE ANISOTROPY PROBE ( WMAP ) OBSERVATIONS: COSMOLOGICAL PARAMETER RESULTS journal September 2013
Dual-Polarized Sinuous Antennas on Extended Hemispherical Silicon Lenses journal September 2012
A superconducting bolometer with strong electrothermal feedback journal September 1996
SPT-3G: a next-generation cosmic microwave background polarization experiment on the South Pole telescope conference July 2014
Low Loss Superconducting Microstrip Development at Argonne National Lab journal June 2015
A dual-polarized broadband planar antenna and channelizing filter bank for millimeter wavelengths journal February 2013

Similar Records

Fabrication of Large Dual-Polarized Multichroic TES Bolometer Arrays for CMB Measurements with the SPT-3G Camera
Journal Article · Tue Aug 11 00:00:00 EDT 2015 · Supercond.Sci.Technol. · OSTI ID:1594616
Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera
Journal Article · Tue Aug 11 00:00:00 EDT 2015 · Superconductor Science and Technology · OSTI ID:1594616
+66 more
Large arrays of dual-polarized multichroic TES detectors for CMB measurements with the SPT-3G receiver
Journal Article · Tue Jul 19 00:00:00 EDT 2016 · Proceedings of SPIE - The International Society for Optical Engineering · OSTI ID:1594616
+73 more

Related Subjects

79 ASTRONOMY AND ASTROPHYSICS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
astronomy
superconducting
bolometers
TES detectors
multichroic sensors
CMB
polarimetry
microfabrication
low loss microstrip