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Title: Automated Geometry assisted PEC for electron beam direct write nanolithography

Nanoscale geometry assisted proximity effect correction (NanoPEC) is demonstrated to improve PEC for nanoscale structures over standard PEC, in terms of feature sharpness for sub-100 nm structures. The method was implemented onto an existing commercially available PEC software. Plasmonic arrays of crosses were fabricated using regular PEC and NanoPEC, and optical absorbance was measured. Results confirm that the improved sharpness of the structures leads to increased sharpness in the optical absorbance spectrum features. We also demonstrated that this method of PEC is applicable to arbitrary shaped structures beyond crosses.
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Publication Date:
OSTI Identifier:
DOE Contract Number:
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics; Journal Volume: 33; Journal Issue: 6
American Vacuum Society/AIP
Research Org:
Argonne National Laboratory (ANL)
Sponsoring Org:
USDOE Office of Science; USDOE U.S. Department of Energy
Country of Publication:
United States