Standing wave and skin effects in large-area, high-frequency capacitive discharges
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journal
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June 2002 |
Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge
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journal
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May 2004 |
Ion flux nonuniformities in large-area high-frequency capacitive discharges
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journal
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July 2003 |
Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber
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journal
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October 2006 |
Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor
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journal
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October 2006 |
Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges
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journal
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May 2007 |
Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas
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journal
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September 1996 |
Application of mid-infrared tuneable diode laser absorption spectroscopy to plasma diagnostics: a review
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journal
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October 2006 |
Comparison of electron‐density measurements made using a Langmuir probe and microwave interferometer in the Gaseous Electronics Conference reference reactor
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journal
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October 1993 |
Two‐dimensional argon metastable density measurements in a radio frequency plasma reactor by planar laser‐induced fluorescence imaging
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journal
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June 1995 |
Planar laser-induced fluorescence of CF2 in O2/CF4 and O2/C2F6 chamber-cleaning plasmas: Spatial uniformity and comparison to electrical measurements
- Steffens, Kristen L.; Sobolewski, Mark A.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 17, Issue 2
https://doi.org/10.1116/1.581613
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journal
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March 1999 |
RF discharge under the influence of a transverse magnetic field
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journal
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August 2008 |
Nonmonotonic radial distribution of excited atoms in a positive column of pulsed direct currect discharges in helium
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journal
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January 2013 |
Two-dimensional mapping of electron densities and temperatures using laser-collisional induced fluorescence
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journal
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September 2010 |
The electron spatial distribution and leak width in a magnetic cusp
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journal
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February 2014 |
Spatial profiles of electron and metastable atom densities in positive polarity fast ionization waves sustained in helium
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journal
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September 2014 |
Space and time resolved electric field measurements in helium and hydrogen RF-discharges
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journal
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January 1999 |
Diagnostics of electric fields in plasma using Stark spectroscopy of krypton and xenon atoms
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journal
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September 2006 |
Electric fields in a sheath near a metal–dielectric interface
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journal
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October 2004 |
Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges
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journal
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September 2011 |
The application of CW laser collisionally induced fluorescence modelling to determine neon excited-state electron collisional rate coefficients
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journal
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October 2000 |
Investigation of the neon 2p collisional excitation transfer processes via CW laser collisionally induced fluorescence
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journal
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April 2001 |
Model for cw laser collisionally induced fluorescence in low-temperature discharges
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journal
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August 2000 |
Complementary optical diagnostic modelling of the argon positive column
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journal
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July 2002 |
Collisional transfer rates between excited levels in helium
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journal
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November 1978 |
Collisional processes induced in the n=3 helium sublevels by electrons in a low-pressure plasma. Application to the electron density measurement
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journal
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December 1985 |
Plasma electron density measurements by the laser- and collision-induced fluorescence method
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journal
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September 1983 |
Electron temperature and density diagnostics in a helium glow discharge
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journal
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March 1989 |
Electron density measurement in a rf helium plasma by laser‐collision induced fluorescence method
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journal
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September 1996 |
LIF measurements on an atomic helium beam in the edge of a fusion plasma
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journal
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April 2008 |
Measurements of helium metastable density in an atmospheric pressure glow discharge
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journal
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August 2004 |
Rate coefficients for collisional population transfer between argon levels at 300°K
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journal
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October 1978 |
Radiative lifetimes and collisional energy transfer rate constants in Ar of the Ar(3 p 5 5 p ) and Ar(3 p 5 5 p ′) states
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journal
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January 1982 |
Time resolved laser induced fluorescence on argon intermediate pressure microwave discharges: Measuring the depopulation rates of the 4p and 5p excited levels as induced by electron and atom collisions
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journal
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October 2013 |
Collisional-radiative model for an argon glow discharge
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journal
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July 1998 |
An update of argon inelastic cross sections for plasma discharges
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journal
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May 2005 |
Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models
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journal
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October 2005 |
Microwave Measurements of High Electron Densities
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journal
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April 1957 |
Drift Velocities of Low Energy Electrons in Argon at 293 and 90 K
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journal
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January 1977 |
Electron transport parameters in argon and its momentum transfer cross section
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journal
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May 1988 |
Longitudinal electron diffusion coefficients in gases: Noble gases
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journal
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June 1992 |
Principles of Plasma Discharges and Materials Processing
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book
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January 2005 |
Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
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journal
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March 2012 |
High power impulse magnetron sputtering discharge
- Gudmundsson, J. T.; Brenning, N.; Lundin, D.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 3
https://doi.org/10.1116/1.3691832
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journal
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May 2012 |
High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
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journal
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March 2012 |
Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas
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journal
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July 2013 |