One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma
- California Inst. of Technology (CalTech), Pasadena, CA (United States)
A time-dependent two-fluid model has been developed to understand axial variations in the plasma parameters in a very high density (peak ne~ > 5x1019 m–3) argon inductively coupled discharge in a long 1.1 cm radius tube. The model equations are written in 1D, with radial losses to the tube walls accounted for by the inclusion of effective particle and energy sink terms. The ambipolar diffusion equation and electron energy equation are solved to find the electron density ne(z,t) and temperature Te(z,t), and the populations of the neutral argon 4s metastable, 4s resonant, and 4p excited state manifolds are calculated in order to determine the stepwise ionization rate and calculate radiative energy losses. The model has been validated through comparisons with Langmuir probe ion saturation current measurements; close agreement between the simulated and measured axial plasma density profiles and the initial density rise rate at each location was obtained at pAr = 30-60 mTorr. Lastly, we present detailed results from calculations at 60 mTorr, including the time-dependent electron temperature, excited state populations, and energy budget within and downstream of the radiofrequency (RF) antenna.
- Research Organization:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- SC0010471; FG02-04ER54755
- OSTI ID:
- 1236697
- Alternate ID(s):
- OSTI ID: 1234030
- Journal Information:
- Journal of Applied Physics, Vol. 118, Issue 24; ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
Metastables as a probe for low-temperature plasma characteristics in argon
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journal | March 2019 |
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