Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

Journal Article · Mon May 11 00:00:00 EDT 2015 · Proceedings of the National Academy of Sciences of the United States of America

DOI:https://doi.org/10.1073/pnas.1423889112· OSTI ID:1235169

Ning, Hailong ^[1]; Pikul, James H. ^[2]; Zhang, Runyu ^[1]; Li, Xuejiao ^[1]; Xu, Sheng ^[1]; Wang, Junjie ^[1]; Rogers, John A. ^[3]; King, William P. ^[3]; Braun, Paul V. ^[3]

---

1. Department of Materials Science and Engineering, University of Illinois at Urbana–Champaign, Urbana, IL 61801, and
2. Department of Mechanical Science and Engineering, University of Illinois at Urbana–Champaign, Urbana, IL 61801
3. Department of Materials Science and Engineering, University of Illinois at Urbana–Champaign, Urbana, IL 61801, and, Department of Mechanical Science and Engineering, University of Illinois at Urbana–Champaign, Urbana, IL 61801

As sensors, wireless communication devices, personal health monitoring systems, and autonomous microelectromechanical systems (MEMS) become distributed and smaller, there is an increasing demand for miniaturized integrated power sources. Although thin-film batteries are well-suited for on-chip integration, their energy and power per unit area are limited. Three-dimensional electrode designs have potential to offer much greater power and energy per unit area; however, efforts to date to realize 3D microbatteries have led to prototypes with solid electrodes (and therefore low power) or mesostructured electrodes not compatible with manufacturing or on-chip integration. Here in this paper, we demonstrate an on-chip compatible method to fabricate high energy density (6.5 μWh cm^-2∙μm^-1) 3D mesostructured Li-ion microbatteries based on LiMnO₂ cathodes, and NiSn anodes that possess supercapacitor-like power (3,600 μW cm(-2)∙μm(-1) peak). The mesostructured electrodes are fabricated by combining 3D holographic lithography with conventional photolithography, enabling deterministic control of both the internal electrode mesostructure and the spatial distribution of the electrodes on the substrate. The resultant full cells exhibit impressive performances, for example a conventional light-emitting diode (LED) is driven with a 500-μA peak current (600-C discharge) from a 10-μm-thick microbattery with an area of 4 mm² for 200 cycles with only 12% capacity fade. Lastly, a combined experimental and modeling study where the structural parameters of the battery are modulated illustrates the unique design flexibility enabled by 3D holographic lithography and provides guidance for optimization for a given application.

• Research Organization: Energy Frontier Research Centers (EFRC). Light-Material Interactions in Energy Conversion (LMI); Univ. of Illinois at Urbana-Champaign, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division
• Contributing Organization: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory
• Grant/Contract Number: FG02-07ER46471; SC0001293
• OSTI ID: 1235169
• Alternate ID(s): OSTI ID: 1210625; OSTI ID: 1875500
• Journal Information: Proceedings of the National Academy of Sciences of the United States of America, Journal Name: Proceedings of the National Academy of Sciences of the United States of America Vol. 112 Journal Issue: 21; ISSN 0027-8424
• Publisher: Proceedings of the National Academy of Sciences
• Country of Publication: United States
• Language: English

Related Subjects

25 ENERGY STORAGE
solar (photovoltaic)
solid state lighting
phonons
thermal conductivity
electrodes - solar
synthesis (self-assembly)
synthesis (novel materials)
optics
materials and chemistry by design
energy storage
interference lithography
lithium-ion batteries
microelectronics
miniature batteries