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Title: Thermally tuneable optical modulator adapted for differential signaling

Patent ·
OSTI ID:1234502

An apparatus for optical modulation is provided. The apparatus includes a modulator structure and a heater structure. The modulator structure comprises a ring or disk optical resonator having a closed curvilinear periphery and a pair of oppositely doped semiconductor regions within and/or adjacent to the optical resonator and conformed to modify the optical length of the optical resonator upon application of a bias voltage. The heater structure comprises a relatively resistive annulus of semiconductor material enclosed between an inner disk and an outer annulus of relatively conductive semiconductor material. The inner disk and the outer annulus are adapted as contact regions for a heater activation current. The heater structure is situated within the periphery of the optical resonator such that in operation, at least a portion of the resonator is heated by radial conductive heat flow from the heater structure. The apparatus further includes a substantially annular isolation region of dielectric or relatively resistive semiconductor material interposed between the heater structure and the modulator structure. The isolation region is effective to electrically isolate the bias voltage from the heater activation current.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation
Patent Number(s):
9,235,065
Application Number:
14/151,637
OSTI ID:
1234502
Resource Relation:
Patent File Date: 2014 Jan 09
Country of Publication:
United States
Language:
English

References (11)

Adiabatic microring modulators journal January 2012
Highly-efficient thermally-tuned resonant optical filters journal January 2010
Exploiting CMOS Manufacturing to Reduce Tuning Requirements for Resonant Optical Devices journal June 2011
Ring Resonator Modulators in Silicon for Interchip Photonic Links journal November 2013
Vertical Junction Silicon Microdisk Modulator with Integrated Thermal Tuner conference January 2013
Depletion-mode polysilicon optical modulators in a bulk complementary metal-oxide semiconductor process journal January 2013
Vertical junction silicon microdisk modulators and switches journal January 2011
Vertical Junction Silicon Microdisk Modulators at 25Gb/s conference January 2013
Resonator systems and methods for tuning resonator systems patent August 2013
Optical device with enhanced mechanical strength patent December 2013
Deep-shallow optical radiation filters patent February 2015

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